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논문 기본 정보

자료유형
학술저널
저자정보
(서울과학기술대학교) (서울과학기술대학교) (서울과학기술대학교) (서울과학기술대학교)
저널정보
Korean Society for Precision Engineering Journal of the Korean Society for Precision Engineering Journal of the Korean Society for Precision Engineering Vol.36 No.4
발행연도
수록면
413 - 418 (6page)
DOI
10.7736/KSPE.2019.36.4.413

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초록· 키워드

Fabrication of inverse-tapered structure remains as a problem in the fabrication of oleophobic surface mostly due to the complications and the high cost of processes. In this paper, we propose a simple and low-cost fabrication method of inverse-tapered structured oleophobic surface using micromolding in capillaries (MIMIC) and microtransfer molding followed by MEMS processes. Silicon wafer molds for the formation of inverse-tapered structure were made using MEMS processes such as photolithography and anisotropic KOH etching of silicon wafer. The geometry of structure could be changed by controlling the etching depth of the silicon wafer mold. After covering the surface of the mold using flat UV tape, the formed space between mold and UV tape was filled with pre-cured PDMS by capillary force and then cured in oven. The tapered structure on UV tape was transferred and bonded to glass wafer by O₂ plasma treatment. The fabricated inverse-tapered structure was coated with a fluoroalkylsilane monolayer to reduce its surface energy. The wetting behaviors were investigated by the contact angle (CA) measurement of hexadecane droplets. This study demonstrates that an inversetapered structure can be fabricated on a substrate using micromolding in capillaries and microtransfer molding, whose surface shows the superoleophobicity.
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  1. 1. 서론
  2. 2. 본론
  3. 3. 실험 결과 및 고찰
  4. 4. 결론
  5. REFERENCES

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UCI(KEPA) : I410-ECN-0101-2019-555-000547243