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[학술저널]

  • 학술저널

Youngmin Kim(Inha University) Jan Petykiewicz(Stanford University) Shashank Gupta(Stanford University) Jelena Vuckovic(Stanford University) Krishna C. Saraswat(Stanford University) Donguk Nam(Inha University)

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초록

We present a new way to create a thermally stable, highly strained germanium (Ge) optical resonator using a novel Ge-on-dual-insulators substrate. Instead of using a conventional way to undercut the oxide layer of a Ge-on-single-insulator substrate for inducing tensile strain in germanium, we use thin aluminum oxide as a sacrificial layer. By eliminating the air gap underneath the active germanium layer, we achieve an optically insulating, thermally conductive, and highly strained Ge resonator structure that is critical for a practical germanium laser. Using Raman spectroscopy and photoluminescence experiments, we prove that the novel geometry of our Ge resonator structure provides a significant improvement in thermal stability while maintaining good optical confinement.

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Abstract
1. Introduction
2. Fabrication Process
3. Results and Discussion
4. Conclusion
References

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