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[학술저널]

고체산화물 전해질의 원자층 증착 공정시 플라즈마 인가를 통한 공정 전력 감소

  • 학술저널

고체산화물 전해질의 원자층 증착 공정시 플라즈마 인가를 통한 공정 전력 감소

Reducing the Process Energy through Applying Plasma in Atomic Layer Deposition of Solid Oxide Fuel Cell Electrolyte

지상훈(한국건설기술연구원)

DOI : 10.7736/KSPE.2019.36.5.515

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초록

The energy saving effect of reactant plasma in Atomic Layer Deposition (ALD) of ultrathin solid oxide fuel cell electrolyte was examined by measuring electrical current in real time. Actuating a plasma generator led to a remarkable change in electric current and therefore a Plasma Enhanced ALD (PE-ALD) Yttria-Stabilized Zirconia (YSZ) supercycle demanded ~12% higher process energy than a Thermal ALD (T-ALD) YSZ supercycle. Nonetheless, because PE-ALD YSZ electrolyte providing higher growth rate and higher gas tightness needed 2 times smaller cycle number compared to T-ALD YSZ electrolyte, applying oxygen plasma in ALD of YSZ electrolyte resultantly reduced total process energy by ~44%.

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