지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
오류제보하기
It is a common sense that water is an old offender crashing our dream of achieving a good vacuum in an early time. Various techniques for accelerating the removal of water have been developed and utilized. However, we generally are not skilled in treating the water pumping in a physically proper manner. We are rather used to handle the situation of the water pumping just like considering a conventional air pumping. Under such an erroneous approach, we cannot help making an overestimation on the pumping capability of our vacuum system, and it leads to a big mismatch between the real operation timing and the planned process schedule. In this article, some main points concerning with the subject that a vacuum pumping is really a water pumping will be discussed.
목차
1. 우리는 물 속에서 산다
2. 물을 몰아내기가 말처럼 쉽지 않다
3. 마무리
References
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UCI(KEPA) : I410-ECN-0101-2019-420-000021871