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초록· 키워드
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A metal oxide semiconductor gas sensor is operated by measuring the changes in resistance that occur on the surface of nanostructures for gas detection. ZnO, which is an n-type metal oxide semiconductor, is widely used as a gas sensor material owing to its high sensitivity. Various ZnO nanostructures in gas sensors have been studied with the aim of improving surface reactions. In the present study, the sol-gel and vapor phase growth techniques were used to fabricate nanostructures to improve the sensitivity, response, and recovery rate for gas sensing. The sol-gel method was used to synthesize SnO2 nanoparticles, which were used as the seed layer. The nanoparticles size was controlled by regulating the process parameters of the solution, such as the pH of the solution, the type and amount of solvent. As a result, the SnO2 seed layer suppressed the aggregation of the nanostructures, thereby interrupting gas diffusion. The ZnO nanostructures with a sol-gel processed SnO2 seed layer had larger specific surface area and high sensitivity. The gas response and recovery rate were 1-7 min faster than the gas sensor without the sol-gel process. The gas response increased 4-24 times compared to that of the gas sensor without the sol-gel method.
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참고문헌 (14)
참고문헌 신청
N. Yamazoe / 2003 / Oxide semiconductor gas sensors / Catal. Surv 7(1):63~75
X. Pan / 2015 / A fast-response/recovery ZnO hierarchical nanostructure based gas sensor with ultra-high room-temperature output response / Sens. Actuators B 206:764~771
S. An / 2013 / Enhanced gas sensing properties of branched ZnO nanowires / Thin Solid Films 547(special issue):319~336
H. D. Zhang / 2014 / Fabrication of comb-like ZnO nanostructures for room-temperature CO gas sensing application / Vacuum 101(special issue):113~117
Y. Sun / 2016 / Synthesis of brush-like ZnO nanowires and their enhanced gassensing properties / J. of Mater. Sci 51:1428~1436
X. Pan / 2015 / A fast-response/recovery ZnO hierarchical nanostructure based gas sensor with ultra-high room-temperature output response / Sens. Actuators B 206:764~771
S. An / 2013 / Enhanced gas sensing properties of branched ZnO nanowires / Thin Solid Films 547(special issue):319~336
H. D. Zhang / 2014 / Fabrication of comb-like ZnO nanostructures for room-temperature CO gas sensing application / Vacuum 101(special issue):113~117
Y. Sun / 2016 / Synthesis of brush-like ZnO nanowires and their enhanced gassensing properties / J. of Mater. Sci 51:1428~1436
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