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    초록·키워드

    An investigation is reported by the growth of MgO nano-film on BaMgAl₁?O₁?:Eu? blue phosphor using atomic layer deposition. Magnesium oxide films were prepared at the 120℃ using Mg(CpEt)₂ and H₂O as precursor and reactant gas, respectively. EDX analysis showed the height of the Mg peak is higher than that of uncoated phosphor. In TEM and FESEM analysis, the growth rate was about 0.4 Å/cycle and the surface morphology became smoother and clearer than that of uncoated phosphor. The photoluminescence intensity for coaled phosphors showed ~30% higher than that of uncoated. This means that the reactive surface is uniformly grown with stable magnesium oxide to reduce the dead surface layer without change of bulk properties and also its absorptance is almost negligible due to nona-scaled films.

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      UCI(KEPA) : I410-ECN-0101-2009-325-019101943