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논문 기본 정보

저자정보
(Hongik University) (Hongik University)
저널정보
대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.18 No.2
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    초록·키워드

    In this work, we designed and developed an integrated pressure-sensor system with a perfectly linear sensitivity. We used a resistive-type indicator pressure-sensor in order to measure a gas-level which is observed to be inversely proportional to sensor output-resistance. Then, the output resistance was converted into the corresponding voltage which was processed via several sensor-conditioning steps (buffering, level-shifting, amplification). We analyzed the sensitivity errors at level-shifting stage and then proposed the new and simple approach for a perfectly linear-sensitivity in sensor-conditioning processes by using only a constant voltage supply without the potentiometer, which is common in previous works. Even though the sensor output was generally adjusted to the full scale of the reading, we have a perfectly linear sensitivity and the devices fabricated exhibited linear characteristics without any sensitivity error.

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