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논문 기본 정보

저자정보
(Hankuk University of Foreign Studies) (Hankuk University of Foreign Studies)
저널정보
대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.24 No.5
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    초록·키워드

    Based on the analysis of the RF inductive effect due to the negative capacitance observed in the S<SUB>22</SUB> -parameter of floating body PD-SOI n-MOSFETs on the Smith chart, the reason why this effect appears at a much higher V <SUB>DS</SUB>than the DC kink voltage V<SUB>kink</SUB> , unlike in body contact devices, is revealed for the first time. The origin of the anomalous V<SUB>DS</SUB> - dependence on RF inductive effect is identified by analyzing the V<SUB>DS</SUB> - dependent kink conductance Gk and the pole frequency p f , which are extracted using the frequency curves of the output admittance. Using the measured G<SUB>k</SUB> versus V<SUB>DS</SUB> data, which is validated by a physical body transconductance mbg equation, it is confirmed that the turning radius of the S<SUB>22 </SUB> -parameter is reduced at lower V<SUB>DS</SUB> due to a decrease in g<SUB>mb</SUB> . It is theoretically proven that the extracted f<SUB>p</SUB> data is reduced as V<SUB>DS</SUB> decreases, and if f<SUB>p</SUB> is less than the minimum measurement frequency, the rotation angle of the S<SUB>22</SUB> trajectory becomes significantly smaller. Due to the decrease in g<SUB>mb</SUB> and f<SUB>p</SUB> at lower , V<SUB>DS</SUB> the anomalous RF inductive effect is exhibited in floating body devices.

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