인문학
사회과학
자연과학
공학
의약학
농수해양학
예술체육학
복합학
DBpia AI
AI 에이전트
AI 아이디어
AI 리더
AI 뷰어
Citeasy
크롬 서지관리 다운로드
지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록·키워드
High Bandwidth Memory (HBM) fabrication requires highly reliable Thermo Compression (TC) bonding, where rapid heating and cooling of ceramic pulse heaters are critical to bonding quality. While heating characteristics have been widely studied, cooling strategies remain insufficiently explored. This study numerically investigates hybrid cooling channels that combine jet impingement with micro-channel flows to enhance transient cooling performance. Three geometries-Aligned, Staggered, and Zigzag-were modeled using transient computational fluid dynamics with the Realizable k-ε turbulence model. Cooling effectiveness was evaluated through heater temperature, Nusselt number, and heat flux. Flow structures and cross-sectional Nusselt number distributions along the z-axis were also examined to identify mechanisms governing heat transfer. Results showed that the Zigzag configuration with a 30 ° angle (Z30) was the only case reaching the target temperature of 373 K within 10 s, achieving an 8.9 % improvement over the reference design. Although Z30 exhibited the highest total heat removal, Z20 achieved slightly higher area-normalized heat flux due to its smaller cooling area, indicating a trade-off between absolute cooling capacity and surface efficiency. Flow analysis revealed that periodic separation and reattachment in the Zigzag channel continuously disrupted the thermal boundary layer, sustaining higher Nusselt numbers along the z-axis. These findings highlight the importance of channel geometry, with Zigzag layouts offering a promising pathway to improve TC bonding reliability in next-generation HBM packaging.
본문·목차
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