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논문 기본 정보

자료유형
학술저널
저자정보
저널정보
한국진공학회(ASCT) Applied Science and Convergence Technology Journal of Korean Vacuum Society Vol.12 No.S1
발행연도
수록면
88 - 91 (4page)

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초록· 키워드

Electromagnetic interference shielding and near-infrared cutoff filters for plasma display panel application were designed and fabricated by radio frequency magnetron sputtering. Three types of the filters were prepared: the basic structure of type A consisted of [TiO₂|Ti|Ag|TiO₂]; type B, of [TiO₂|ITO|Ag|TiO₂]; type C, of [TiO₂|ITO|Ag|ITO| TiO₂]. Ti and ITO layers deposited on Ag layers were employed as barriers to prevent the oxidation and the diffusion of Ag film into the adjacent oxide layers. Optical, electrical, chemical, and structural properties were investigated, and the result shows that the filters with the ITO barrier layers provided an enhancement in transmittance in the visible owing to a lower absorption of ITO layers than Ti layers. Type C filter showed better optical and electrical performances and smoother surface roughness than Type B and C filters: the average sheet resistance was as low as 1.51 Ω/□ (where □ stands for a square film), the peak transmittance in the visible was as high as 78.2 %, and the average surface roughness was 1.48 ㎚.
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목차

  1. Abstract
  2. 1. Introduction
  3. 2. Designs and Experimentals
  4. 3. Results and Discussion
  5. 4. Conclusions
  6. Acknowledgments
  7. References

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UCI(KEPA) : I410-ECN-0101-2019-420-001268070