Epitaxial $SnO_2$ Thin Films on Sapphire($1\bar{1}02$) and ($11\bar{2}0$) Deposited by Atomic Layer Deposition

Kim ,  Dai-Hong ,  Hong 외 1명

한국결정학회 학술연구발표회

2007 .01

Deposition and Characterization of $Al_2O_3$ Thin Film by Aerosol Deposition

Cho ,  Hyun-Min ,  Kim 외 1명

한국결정학회 학술연구발표회

2007 .01

Effects of Annealing of Al2O3 Layer on Passivation Properties by Plasma Assisted Atomic Layer Deposition

송세영 ,  장효식 ,  송희은

한국진공학회 학술발표회초록집

2013 .02

Room Temperature Deposition of ZrO₂ thin film by using UV - enhanced Atomic Layer Deposition

강문철 ,  성명모

한국진공학회 학술발표회초록집

2005 .02

Characteristic analysis of HfO2 thin films deposited at low-temperature using direct plasma-enhanced atomic layer deposition

김경문 ,  윤순길 ,  정낙관

한국진공학회 학술발표회초록집

2020 .02

Electrical Properties of Copper Oxide Thin Films Deposited by Atomic Layer Deposition

Byung Kook Lee ,  Jae Ki Min ,  Sun Sook Lee 외 4명

한국진공학회 학술발표회초록집

2009 .08

Fabrication and Characterization of Organic-Inorganic Hybrid Thin Films

C.T.T.Huong ,  Myung Mo Sung

한국진공학회 학술발표회초록집

2020 .02

Low - temperature atomic layer deposition of AlN thin films using plasma interactions

Yong Ju Lee ,  Sang-Won Kang

한국진공학회 학술발표회초록집

2003 .02

Deposition and characterization of inorganic thin films by using UV-enhanced Atomic Layer Deposition

정진원 ,  성명모

한국진공학회 학술발표회초록집

2015 .02

Multilayer barrier film fabricated by Plasma Enhanced Chemical Vapor Deposition and Atomic Layer Deposition

Chang-Kyu Jin ,  Do-Kyung Hwang ,  Tae-Hwan Kim 외 1명

한국진공학회 학술발표회초록집

2014 .08

Low Temperature Encapsulation-Layer Fabrication of Organic-Inorganic Hybrid Thin Film by Atomic Layer Deposition-Molecular Layer Deposition

김세준 ,  김홍범 ,  성명모

한국진공학회 학술발표회초록집

2013 .02

Characterization of the Interface & ZrO₂ film fabricated by Atomic Layer Deposition method

박윤백 ,  연태원 ,  최민기 외 4명

한국진공학회 학술발표회초록집

2009 .08

Atomic Layer Deposited Metal Thin Films on T-shirts

Han-Bo-Ram Lee

한국진공학회 학술발표회초록집

2017 .08

Synthesis and Characterization of SnO2 Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition Using SnCl4 Precursor and Oxygen Plasma

이동권 ,  김다영 ,  권세훈

한국진공학회 학술발표회초록집

2016 .02

Electric Characteristics of HfO₂ deposited by Atomic Layer Deposition

김수현 ,  박재경 ,  노용한

한국진공학회 학술발표회초록집

2008 .08

The Effect of Thickness on Flexible, Electrical and Optical properties of Ti- ZnO films on Flexible Glass by Atomic Layer Deposition

이우재 ,  윤은영 ,  권세훈

한국진공학회 학술발표회초록집

2016 .02

Study of SrTiO₃ for Dielectric Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition

임찬중 ,  임동혁 ,  마진원 외 5명

한국진공학회 학술발표회초록집

2009 .02

Plasma Enhanced Atomic Layer Deposition 기술을 이용한 Al₂O₃와 ZrO₂ 박막의 증착 및 특성 연구

윤선진 ,  임정욱 ,  이진호

한국진공학회 학술발표회초록집

2004 .08

Hybrid organic-inorganic thin film transistors with visible-light absorption by using combination molecular layer deposition and atomic layer deposition

N.V.Long ,  Myung Mo Sung

한국진공학회 학술발표회초록집

2020 .02

Pure Cobalt Thin Film by using Very High frequency (60MHz) Plasma-Enhanced Atomic Layer Deposition

Chang Hoon Song ,  Won Kyun Yeom ,  Doo San Kim 외 3명

한국진공학회 학술발표회초록집

2018 .08