Metalorganic Chemical Vapor Deposition of Ga₂O₃ Thin Films Using Dimethylgallium Isopropoxide and O₂

우정준 ,  박영수 ,  이희주 외 3명

한국진공학회 학술발표회초록집

2010 .02

Unusual ALD Behaviors in Functional Oxide Films for Semiconductor Memories

Cheol Seong Hwang

한국진공학회 학술발표회초록집

2013 .08

Atomic Layer Deposition of TiO2 Thin Films from Titanium Isopropoxide and Water

이재필 ,  장영진 ,  곽현태 외 4명

한국진공학회 학술발표회초록집

2002 .02

Synthesis of gallium oxide-related nanocrystalline materials for photocatalyst applications

L.Sivananda Reddy ,  Yeong Hwan Ko ,  Jae Su Yu

한국진공학회 학술발표회초록집

2014 .08

Fabrication of dense Al2O3 thin films using UV-enhanced ALD at room temperature

윤관혁 ,  성명모

한국진공학회 학술발표회초록집

2014 .08

The study of physical property for indium oxide grown by Atomic Layer Deposition (ALD)

Young Joon Cho ,  Hyo Sik Chang

한국진공학회 학술발표회초록집

2015 .02

Effect of deposition temperature and thickness on surface properties of ALD TiO₂ films

장영문 ,  양병찬 ,  신정우 외 2명

한국진공학회 학술발표회초록집

2017 .02

Controlling Electrical Properties in Zinc Oxide Thin Films by Organic Concentration

윤관혁 ,  한규석 ,  정진원 외 1명

한국진공학회 학술발표회초록집

2013 .08

White Light Generation from Single Gallium Oxide Nanoparticles co-doped with Rare-Earth Metals

P ,  ashant Patil ,  Jinsung Pa 외 5명

Applied Science and Convergence Technology

2014 .09

Characterization of Al2O3 Thin Film Encasulation by Plasma Assisted Spatial ALD Process for Organic Light Emitting Diodes

Sang Heon Yong ,  Sung Min Cho ,  Ho Kyoon Chung 외 1명

한국진공학회 학술발표회초록집

2014 .02

Study of CO Oxidation on Bare and TiO₂-coated NiO/Ni(OH)₂

Jong Won Nam ,  Kwang-Dae Kim ,  Dong Wun Kim 외 3명

한국진공학회 학술발표회초록집

2011 .08

(1210) Gallium Nitride 단결정 박막의 결정구조 및 광학적 특성

황진수 ,  정필조

한국결정학회지

1997 .01

Surface chemistry studies of the ALD process of ZrO₂ thin films

Yu ,  i Kim ,  Chang Min Kim

한국진공학회 학술발표회초록집

2007 .08

Alternating Current Thin Film Electroluminescence from Amorphous Gallium Oxide Doped with Manganese

Kyung Ho Yoon ,  Jin Hong Heo ,  Joo Han Kim

한국진공학회 학술발표회초록집

2008 .02

Multifunctional Thin Film Resistors Prepared by ALD for High-Efficiency Inkjet Printheads

Won-Sub Kwack ,  Se-Hun Kwon

한국진공학회 학술발표회초록집

2012 .08

ALD growth of HfO₂ thin films using Hf(mp)₄ and water

조원태 ,  장홍석 ,  양택승 외 7명

한국진공학회 학술발표회초록집

2004 .08

Novel Zinc Precursors for ZnO Thin Film Deposition by ALD

Seong Ho Han ,  Raphael Edem Agbenyeke ,  Ga Yeon Lee 외 6명

한국진공학회 학술발표회초록집

2020 .08

In - situ XPS study of UHV - Atomic Layer Deposition of TiO₂thin films on Si substrates using titanium isopropoxide and water

이정오 ,  이정욱 ,  곽현태 외 1명

한국진공학회 학술발표회초록집

2003 .08

Manufacture and characteristic evaluation of Amorphous Indium-Gallium-Zinc-Oxide (IGZO) Thin Film Transistors

성상윤 ,  한언빈 ,  김세윤 외 4명

한국진공학회 학술발표회초록집

2010 .08

Fabrication of ZnO inorganic thin films by using UV-enhanced Atomic Layer Deposition

송종수 ,  윤홍로 ,  성명모

한국진공학회 학술발표회초록집

2016 .02