지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
이용수
초록· 키워드
오류제보하기
Magnetic seal uses a magnetic fluid to seal a gap between a rotating shaft and housing. It is distinguished from other kinds of seals from the fact that solid contact does not occur in the seal. This implies that it is free from solid rubbing thus dustless and provides a clean circumstance. That is the reason why the magnetic seal is used exclusively for most of vacuum chambers in semiconductor process where dustless clean circumstance is critical.
A magnetic seal has been developed of which design parameters are determined based on published data, and an air pressure test has been done to examine its sealing capability. Effects of some design parameters have been studied through FEM analysis. The results show some notable aspects of design parameters and provide suggestions for developing the seals. Regarding the sealing capacity of the magnetic seal the factor to match the theoretical value with the actual one was found to be 0.4~0.7, which means still there is some discrepancy between theory and actual.
A magnetic seal has been developed of which design parameters are determined based on published data, and an air pressure test has been done to examine its sealing capability. Effects of some design parameters have been studied through FEM analysis. The results show some notable aspects of design parameters and provide suggestions for developing the seals. Regarding the sealing capacity of the magnetic seal the factor to match the theoretical value with the actual one was found to be 0.4~0.7, which means still there is some discrepancy between theory and actual.
목차
ABSTRACT
1. 서론
2. 마그네틱씰 개발
3. FEM 해석
3. 실험
4. 결론
후기
참고문헌
참고문헌 (6)
참고문헌 신청
1. [학술지(정기간행물)] - Kim, C. K / 1997 / Experimental Study on the Performance Characteristics of Magnetic Fluid Seals for a High Vacuum System / Journal of KSTLE 13 (2) : 105 ~ 111
2. [학술지(정기간행물)] - Szydlo, Z. / 2005 / Experiments on Magnetic Fluid Rotary Seals Operating Under Vacuum Conditions / Tribotest Journal 11 (4) : 345 ~ 354
3. [학술지(정기간행물)] - Zou, J. / 2003 / Design and Pressure Control of High Pressure Differential Magnetic Fluid Seals / IEEE Transaction on Magnetics 39 (5) : 2651 ~ 2653
4. [학술지(정기간행물)] - Szydto, Z. / 2007 / Experimental Research on Effectiveness of the Magnetic Fluid Seals for Rotary shafts Working in Water / Polish Maritime Research 14 (4) : 53 ~ 58
5. [단행본] - Borbath, I. / 2006 / Application of Magnetic Nanofluids in Rotating Seals, In Convergence of micro- and nanoengineering / Romanian Academy Publ.House : 200 ~ 210
2. [학술지(정기간행물)] - Szydlo, Z. / 2005 / Experiments on Magnetic Fluid Rotary Seals Operating Under Vacuum Conditions / Tribotest Journal 11 (4) : 345 ~ 354
3. [학술지(정기간행물)] - Zou, J. / 2003 / Design and Pressure Control of High Pressure Differential Magnetic Fluid Seals / IEEE Transaction on Magnetics 39 (5) : 2651 ~ 2653
4. [학술지(정기간행물)] - Szydto, Z. / 2007 / Experimental Research on Effectiveness of the Magnetic Fluid Seals for Rotary shafts Working in Water / Polish Maritime Research 14 (4) : 53 ~ 58
5. [단행본] - Borbath, I. / 2006 / Application of Magnetic Nanofluids in Rotating Seals, In Convergence of micro- and nanoengineering / Romanian Academy Publ.House : 200 ~ 210
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