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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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초록· 키워드
오류제보하기
Ionization and Attachment Coefficients in pure CH<SUB>4</SUB>, CF<SUB>4</SUB> and mixtures of CF<SUB>4</SUB> and Ar, have been analyzed over a range of the reduced electric field strength between 0.1 and 350[Td] by the two-term approximation of the Boltzmann equation (BEq.) method and the Monte Carlo simulation (MCS). The calculations of electron swarm parameters require the knowledge of several collision cross-sections of electron beam. Thus, published momentum transfer, ionization, vibration, attachment, electronic excitation, and dissociation cross-sections of electrons for CH<SUB>4</SUB>, CF<SUB>4</SUB> and Ar, were used. The results of the Boltzmann equation and the Monte Carlo simulation have been compared with the data presented by several workers. The deduced transport coefficients for electrons agree reasonably well with the experimental and simulation data obtained by Nakamura and Hayashi. The energy distribution function of electrons in CF<SUB>4</SUB>-Ar mixtures shows the Maxwellian distribution for energy. That is, f(ε) has the symmetrical shape whose axis of symmetry is a most probably energy. The proposed theoretical simulation techniques in this work will be useful to predict the fundamental process of charged particles and the breakdown properties of gas mixtures.
목차
Abstract
1. 서론
2. MCS-BEq법
3. 전자충돌 단면적
4. 결과 및 고찰
5. 결론
감사의 글
참고문헌
저자소개
참고문헌 (23)
참고문헌 신청
1. [단행본] - Flamm D. L. / 1989 / Plasma Etching / Academic Press : 91 ~ 183
2. [단행본] - Flamm D. L. / 1997 / Plasma Processing of Semiconductors : 1 ~ 22
3. [단행본] - 奧田孝美 / 1975 / 氣體プラズマ現象 / コロナ社 : 21 ~ 33
4. [단행본] - 山本賢三 / 1977 / 電離氣體 / コロナ사 : 161 ~ 197
5. [단행본] - 武田進 / 1976 / プラズマの基礎 / 朝倉 書店 : 17 ~ 58
2. [단행본] - Flamm D. L. / 1997 / Plasma Processing of Semiconductors : 1 ~ 22
3. [단행본] - 奧田孝美 / 1975 / 氣體プラズマ現象 / コロナ社 : 21 ~ 33
4. [단행본] - 山本賢三 / 1977 / 電離氣體 / コロナ사 : 161 ~ 197
5. [단행본] - 武田進 / 1976 / プラズマの基礎 / 朝倉 書店 : 17 ~ 58
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UCI(KEPA) : I410-ECN-0101-2013-560-001569142