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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2012.10
- 수록면
- 773 - 777 (5page)
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초록· 키워드
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Recently UV laser micromachining processes is widely introduced to meet the needs of advanced components of IT, BT and ET industries. Due to the characteristics of non-contact and high-speed laser processing, UV laser micromachining is applied to manufacture very thin substrate such as polymer, metals and composite. These minimum line width obtained by UV laser micromachining is generally determined from laser wavelength, optical lens and its numerical aperture. In this paper we will show the lens effect of water droplet on the surface of workpiece to reduce the line width when UV laser light is irradiated and focused through the water droplet. Because of the refraction effect generated by the semi-spherical or spherical shape of water droplet, we can find smaller line width. And water droplet could not only protect thermal deformation, but also carry away burr around micro dent. Firstly fundamental theory of minimum line width was derived from relationship between the geometry of water droplet and laser light trace, and then experimental and simulation results
will be finally compared to verify the effectiveness of water droplet lens effect of UV laser micromachining process.
will be finally compared to verify the effectiveness of water droplet lens effect of UV laser micromachining process.
목차
Abstract
1. 서론
2. 이론적 접근
3. 실험 결과 및 고찰
4. 결론
References
참고문헌 (7)
참고문헌 신청
1. [학술지(정기간행물)] - Hu, T / 2006 / 3-D FEM Simulation of Laser Shock Processing / Surface & Coatings Technology 201 (3-4) : 1426 ~ 1435
2. [학술지(정기간행물)] - Zhang, W / 2001 / Microscale Laser Shock Processing-Modeling, Testing and Microstructure Charac-terization / Journal of Manufacturing Processes 3 (2) : 128 ~ 143
3. [학술지(정기간행물)] - 오재용 / 2007 / 355nm UV레이저를 이용한 구리 박판 가공시 어블레이션에 관한 연구 / 한국정밀공학회지 24 (2) : 134 ~ 139
4. [학술지(정기간행물)] - Kruusing, A / 2004 / Underwater and Water-assisted Laser Processing: Part 2-Etching, Cutting and Rarely used Methods / Optics and Lasers Engineering 41 (2) : 329 ~ 352
5. [학술지(정기간행물)] - Kruusing, A / 2004 / Underwater and Water-assisted Laser Processing: Part 1-General Features, Steam Cleaning and Shock Processing / Optics and Lasers Engineering 41 (2) : 307 ~ 327
2. [학술지(정기간행물)] - Zhang, W / 2001 / Microscale Laser Shock Processing-Modeling, Testing and Microstructure Charac-terization / Journal of Manufacturing Processes 3 (2) : 128 ~ 143
3. [학술지(정기간행물)] - 오재용 / 2007 / 355nm UV레이저를 이용한 구리 박판 가공시 어블레이션에 관한 연구 / 한국정밀공학회지 24 (2) : 134 ~ 139
4. [학술지(정기간행물)] - Kruusing, A / 2004 / Underwater and Water-assisted Laser Processing: Part 2-Etching, Cutting and Rarely used Methods / Optics and Lasers Engineering 41 (2) : 329 ~ 352
5. [학술지(정기간행물)] - Kruusing, A / 2004 / Underwater and Water-assisted Laser Processing: Part 1-General Features, Steam Cleaning and Shock Processing / Optics and Lasers Engineering 41 (2) : 307 ~ 327
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UCI(KEPA) : I410-ECN-0101-2014-552-001020857