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This paper describes the information for quantitative simulation of weakly ionized plasma. We must grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. Using quantitative simulations of weakly ionized plasma, we can analyze gas characteristic. In this paper, the electron transport characteristic in CH₄ has been analysed over the E/N range 0.1～300[Td], at the 300[。K] by the two term approximation Boltzmann equation method and Monte Carlo Simulation. Boltzmann equation method has also been used to predict swarm parameter using the same cross sections as input. The behavior of electron has been calculated to give swarm parameter for the electron energy distribution function has been analysed in CH₄ at E/N=10, 100 for a case of the equilibrium region in the mean energy. A set of electron collision cross section has been assembled and used in Monte Carlo simulation to predict values of swarm parameters. The result of Boltzmann equation and Monte Carlo Simulation has been compared with experimental data by Ohmori, Lucas and Carter. The swarm parameter from the swarm study are expected to sever as a critical test of current theories of low energy scattering by atoms and molecules.
목차
Abstract
1. 서론
2. 해석방법
3. 전자충돌 단면적
4. 결과 및 고찰
5. 결론
감사의 글
참고문헌
저자소개
참고문헌 (17)
참고문헌 신청
1. [기타자료] - 山本 / 1992 / モンテカルロシミユレーツヨンによるCF4カ スの 電子衝突 斷面績 / 電氣學會 放電硏究會資料, ED-92-101 : 71 ~ 80
2. [단행본] - 菅野卓 / 1993 / 半導體 プラズマ プロセス技術 / 産業圖書 : 38 ~ 50
3. [학술지(정기간행물)] - L. E. Kline / 1989 / Measurements of swarm parameters and derived electron collision cross sections in methane / J. Appl. Phys 65 : 3311 ~ 3323
4. [학술지(정기간행물)] - Y Ohmori / 1986 / Boltzmann equation analysis of electron swarm behavior in Methane / The Institute of Physics : 437 ~ 455
5. [학술지(정기간행물)] - Y Ohmori / 1986 / Boltzmann equation analysis of electron swarm behavior in Methane / The Institute of Physics : 437 ~ 455
2. [단행본] - 菅野卓 / 1993 / 半導體 プラズマ プロセス技術 / 産業圖書 : 38 ~ 50
3. [학술지(정기간행물)] - L. E. Kline / 1989 / Measurements of swarm parameters and derived electron collision cross sections in methane / J. Appl. Phys 65 : 3311 ~ 3323
4. [학술지(정기간행물)] - Y Ohmori / 1986 / Boltzmann equation analysis of electron swarm behavior in Methane / The Institute of Physics : 437 ~ 455
5. [학술지(정기간행물)] - Y Ohmori / 1986 / Boltzmann equation analysis of electron swarm behavior in Methane / The Institute of Physics : 437 ~ 455
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UCI(KEPA) : I410-ECN-0101-2014-560-000290473