지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
이용수
초록· 키워드
오류제보하기
Various depositional conditions, such as substrate, pressure, deposition time, temperature of substrate, power and gas composition, have mainly been studied to attain DLC films using RF sputtering system up to the current. In this study, the N2/Ar/CH4 gas mixture factored on characteristics of DLC deposited film such as structure, hardness, electrical property were investigated. The concentration of the N2 gas in the sputtering gas may be a significant effect on the growth rate of the doped films, because nitrogen ions react not only with the carbon atoms on the target but also with CxHy ions in the plasma on the substrate surface. It was seen from this experimental that the resistance of deposited film is decreased, and the relative intensity ratio of D to G peak is increased as nitrogen content of film deposition is increased.
목차
ABSTRACT
1. Introduction
2. Experimental
3. Results and Discussions
4. Conclusion
References
참고문헌 (21)
참고문헌 신청
1. [단행본] - Lawrence S. Pan / 1995 / Diamond: Electronic properties and applications / Kluwer Academic publishers
2. [단행본] - Mark A. Prelas / 1998 / Handbook of industrial diamonds and Diamond films / Marcel dekker, Inc
3. [단행본] - Robert F. Davis / 1992 / Diamond films and coatings / Noyer publication
4. [단행본] - Timothy D. Burchell / 1999 / Carbon Materials for Advanced Technologies / Pergamon
5. [학술지(정기간행물)] - S.H. Kim / 2003 / Effect of gas phase composition cycling on diamond nucleation density 425 (1) : 282 ~ 286
2. [단행본] - Mark A. Prelas / 1998 / Handbook of industrial diamonds and Diamond films / Marcel dekker, Inc
3. [단행본] - Robert F. Davis / 1992 / Diamond films and coatings / Noyer publication
4. [단행본] - Timothy D. Burchell / 1999 / Carbon Materials for Advanced Technologies / Pergamon
5. [학술지(정기간행물)] - S.H. Kim / 2003 / Effect of gas phase composition cycling on diamond nucleation density 425 (1) : 282 ~ 286
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UCI(KEPA) : I410-ECN-0101-2014-580-003607029