지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- Korean Society for Precision Engineering Journal of the Korean Society for Precision Engineering 한국정밀공학회지 Vol.31 No.12
- 발행연도
- 2014.12
- 수록면
- 1,133 - 1,139 (7page)
이용수
초록· 키워드
오류제보하기
This paper proposes a simple method to improve a sensitivity of a straightness measurement system for a linear stage, which is applied to a system based on a geometric optic method. An optical system for this method is composed of a corner-cube retro-reflector, a ball-lens and a twodimensional position sensitive detector (2D PSD). The effectiveness of the proposed method was examined theoretically, and verified experimentally using a prototype measurement system. The results show that the measuring sensitivity was dependent on the size of the ball-lens and the setup position of PSD from the ball-lens, and that the proposed method is efficient method to improve the measuring sensitivity.
목차
1. 서론
2. 측정원리
3. 시스템 특성 평가
4. 결론 및 고찰
REFERENCES
참고문헌 (14)
참고문헌 신청
Schwenke, H. / 2008 / Geometric Error Measurement and Compensation of Machines-An Update / Ann CIRP-Manuf. Technol 57(2):660~675
Gao, W. / 2006 / Measurement of Multi-Degree-of-Freedom Error Motions of a Precision Linear Air-Bearing Stage / Precision Eng. 30(1):96~103
Lee, S. W. / 2005 / Development of a Six-Degree-of-Freedom Geometric Error Measure-ment System for a Meso-Scale Machine Tool / J. Manuf. Sci. Eng 127(4):857~865
Wang, W. / 2009 / Development of an Optical Measuring System for Integrated Geometric Errors of a Three-Axis Miniaturized Machine Tool / Int. J. Adv. Manuf. Technol. 43(7-8):701~709
Fan, K. C. / 1998 / A Six-Degree-of-Freedom Measurement System for the Motion Accuracy of Linear Stages / Int. J. Mach. Tools Manufact. 38(3):155~164
Gao, W. / 2006 / Measurement of Multi-Degree-of-Freedom Error Motions of a Precision Linear Air-Bearing Stage / Precision Eng. 30(1):96~103
Lee, S. W. / 2005 / Development of a Six-Degree-of-Freedom Geometric Error Measure-ment System for a Meso-Scale Machine Tool / J. Manuf. Sci. Eng 127(4):857~865
Wang, W. / 2009 / Development of an Optical Measuring System for Integrated Geometric Errors of a Three-Axis Miniaturized Machine Tool / Int. J. Adv. Manuf. Technol. 43(7-8):701~709
Fan, K. C. / 1998 / A Six-Degree-of-Freedom Measurement System for the Motion Accuracy of Linear Stages / Int. J. Mach. Tools Manufact. 38(3):155~164
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UCI(KEPA) : I410-ECN-0101-2015-550-002897783