지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 2014.10
- 수록면
- 667 - 671 (5page)
이용수
초록· 키워드
오류제보하기
Piezo-actuated stages are composed of a piezoelectric actuator (PEA) and a positioning mechanism. Hysteresis behavior of PEAs limits the position accuracy of the piezo-actuated stages. This paper presents a hybrid control approach for precise positioning of a piezo-actuated stage, where Bouc-Wen hysteresis model is used to represent the hysteresis behavior of the PEA. A Luenberger observer-based feedforward controller is designed, and then integrated with a Particle Swarm Optimization (PSO)-based Proportional-Integral-Derivative (PID) controller to form a hybrid controller. Optimal PID gains are obtained based on a fitness function proposed to reduce the displacement error and achieve fast response time. The results show that using the proposed hybrid controller reduces the hysteresis effect significantly, and thus the maximum error is minimized to 0.127 μm, which is 0.17 % of the maximum displacement of 72.1 μm.
목차
Abstract
1. INTRODUCTION
2. MODELING THE PIEZO-ACTUATED STAGE
3. CONTROLLERS DESIGN
4. RESULTS AND DISCUSSION
5. CONCLUSION
REFERENCES
참고문헌 (0)
참고문헌 신청이 논문의 저자 정보
최근 본 자료
댓글(0)
0