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Dry etching of Al₂O3 thin films in inductively coupled plasma system
한국진공학회 학술발표회초록집
2016 .08
Analysis of chemical reactions of CF₄ and C₄F8 for inductively coupled plasma based on plasma parameters
한국진공학회 학술발표회초록집
2019 .08
Development of process plasma diagnosis and control system using plasma emission light diagnostics
한국진공학회 학술발표회초록집
2016 .08
Experimental investigation on plasma density distribution at a wafer-level in an inductively coupled plasma using multiple passive resonant antennas
한국진공학회 학술발표회초록집
2020 .08
Inductively Coupled Plasma Simulation Based on Electron Energy Distribution Function and Process Pressure
Applied Science and Convergence Technology
2020 .11
Oxide 및 Nitride 고선택비 식각 공정에서의 CF4(CHF3)/O2/Ar inductively coupled pulsed plasmas
한국진공학회 학술발표회초록집
2020 .02
Inductively Coupled Plasma 장치에서 Hybrid Plasma Model을 활용한 C₂F8/ O₂ 가스의 특성 해석
한국진공학회 학술발표회초록집
2019 .08
Quantitative analysis of silicone fluid by inductively coupled plasma-optical emission spectroscopy
한국분석과학회 학술대회
2016 .11
Electrical Characteristic and Optical Diagnosis for Atmospheric Direct Plasma Jet
한국진공학회 학술발표회초록집
2015 .08
Experimental investigation on the plasma generation efficiency and plasma parameters in inductively coupled plasmas with a serial and a parallel antenna
한국진공학회 학술발표회초록집
2017 .08
Research on parallelization mechanism of inductively coupled plasma for large area plasma source
한국진공학회 학술발표회초록집
2016 .02
Electrical Characteristics of Inductively Coupled Plasma Sources using Magnetic Resonance Wireless Power Transmission System
한국진공학회 학술발표회초록집
2020 .08
The effect of gas flow on the substrate temperature distribution in an inductively coupled plasma
한국진공학회 학술발표회초록집
2020 .08
Interpretation of current decrease during E - H mode transition in a cylindrical inductively coupled plasma
한국진공학회 학술발표회초록집
2018 .08
Investigation of effect of rf bias frequency on plasma parameters in a remote inductively coupled plasma
한국진공학회 학술발표회초록집
2018 .08
Brief Review of Atomic Layer Etching Based on Radiofrequency-Biased Ar/C₄F6-Mixture-Based Inductively Coupled Plasma Characteristics
Applied Science and Convergence Technology
2023 .03
Measurement of characteristics of plasma discharge in liquid
한국진공학회 학술발표회초록집
2015 .08
Si Fin etching using Cl₂/Ar Sync, Asynchronized Pulsed Inductively Coupled Plasmas
한국진공학회 학술발표회초록집
2020 .08
A Brief Review of Electron Kinetics in Radio-Frequency Plasmas
Applied Science and Convergence Technology
2019 .07
낮은 GWP를 가진 CxF2xO 을 이용한 SiO2 식각 공정 특성에 관한 연구
한국진공학회 학술발표회초록집
2020 .02
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