지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
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This paper presents frequency response compensation technique, and a self-oscillation circuit for capacitive microresonator with the compensation technique using programmable capacitor array, to compensate for the frequency response distorted by parasitic capacitances, and to obtain stable oscillation condition. The parasitic capacitances between the actuation input port and capacitive output port distort the frequency response of the microresonator. The distorted non-ideal frequency response can be compensated using two programmable capacitor arrays, which are connected between anti-phased actuation input port and capacitive output port. The simulation model includes the whole microresonator system, which consists of mechanical structure, transimpedance amplifier with automatic gain control, actuation driver and compensation circuit. The compensation operation and oscillation output of the system is verified with the simulation results.
목차
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참고문헌 (11)
참고문헌 신청
A. Lee / 2008 / Non-ideal behavior of a driving resonator loop in a vibratory capacitive microgyroscope / Microelectr. J 39 (1) : 1 ~ 6
A. Uranga / 2005 / Fully CMOS integrated low voltage 100 MHz MEMS resonator / Elec. Lett 41 (24) : 1327 ~ 1328
H. M. Lavasani / 2011 / A 76 dBOhm 1. 7 GHz 0. 18 um CMOS tunable TIA using broadband current pre-amplifier for high frequency lateral MEMS oscillators / IEEE J. Solid-St. Ci
J. Salvia / 2009 / A 56 MΩ CMOS TIA for MEMS applications / Proc. of IEEE Custom Integrated Circuits Conference 2009(CICC '09), San Jose, USA : 199 ~ 202
K. Sundaresan / 2007 / Electronically temperature compensated silicon bulk acoustic resonator reference oscillators / IEEE J. Solid-St. Circ 42 (2) : 1425 ~ 1434
A. Uranga / 2005 / Fully CMOS integrated low voltage 100 MHz MEMS resonator / Elec. Lett 41 (24) : 1327 ~ 1328
H. M. Lavasani / 2011 / A 76 dBOhm 1. 7 GHz 0. 18 um CMOS tunable TIA using broadband current pre-amplifier for high frequency lateral MEMS oscillators / IEEE J. Solid-St. Ci
J. Salvia / 2009 / A 56 MΩ CMOS TIA for MEMS applications / Proc. of IEEE Custom Integrated Circuits Conference 2009(CICC '09), San Jose, USA : 199 ~ 202
K. Sundaresan / 2007 / Electronically temperature compensated silicon bulk acoustic resonator reference oscillators / IEEE J. Solid-St. Circ 42 (2) : 1425 ~ 1434
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