지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
오류제보하기
We report a Fabry-Perot interferometer (FPI)-based multi-channel micro-spectrometer used for multi-gas measurement in the spectral range of 3-5 m and its gas sensing performance. The fabricated infrared (IR) spectrometer consists of two parts: an FPI on the top side for selective IR filtering and a V2O5-based IR detector array on the bottom side for the detection of the filtered IR. Experimental results show that the FPI-based multi-channel gas sensor has reliability and selectivity for simultaneously detecting environmentally harmful gases such as CH4, CO2, N2O and CO in the spectral range of 3-5 m. The fabricated FPI-based multi-channel gas sensor also demonstrated that a reliable and selective detection of gas concentrations ranging from 0 to 500 ppm is feasible. In addition, the electrical characteristics demonstrate a superior response performance in regards to the selectivity in the multi-target gases.
목차
등록된 정보가 없습니다.
참고문헌 (10)
참고문헌 신청
A. T. T. D. Tran / 1996 / Surface micromachined Fabry-Perot tunable filter / IEEE Photonic Tech Letters 8 : 393 ~ 395
C. Calaza / 2004 / A surface micromachining process for the development of a medium-infrared tunable Fabry-Perot interferometer / Sens. Actuators A 113 : 39 ~ 47
D. Cristea / 2004 / Design and experiments for tunable optical sensor fabrication using (111)-oriented silicon micromachining / Sens. Actuators A 113 : 312 ~ 318
E. Vargas / 2009 / Design of CO, CO2 and CH4 gas sensors based on correlation spectroscopy using a Fabry-Perot interferometer / Sens. Actuators B 137 : 410 ~ 419
H. Ding / 2009 / A novel fiber Fabry-Perot filter based mixed-gas sensing system / Sens. Actuators B 138 : 154 ~ 159
C. Calaza / 2004 / A surface micromachining process for the development of a medium-infrared tunable Fabry-Perot interferometer / Sens. Actuators A 113 : 39 ~ 47
D. Cristea / 2004 / Design and experiments for tunable optical sensor fabrication using (111)-oriented silicon micromachining / Sens. Actuators A 113 : 312 ~ 318
E. Vargas / 2009 / Design of CO, CO2 and CH4 gas sensors based on correlation spectroscopy using a Fabry-Perot interferometer / Sens. Actuators B 137 : 410 ~ 419
H. Ding / 2009 / A novel fiber Fabry-Perot filter based mixed-gas sensing system / Sens. Actuators B 138 : 154 ~ 159
이 논문의 저자 정보
최근 본 자료
댓글(0)
0