지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
이 논문의 연구 히스토리 (3)
2016
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In this paper, we designed and fabricated the novel air flow sensor using air drag force, which can be applied to the low air flow detection. To measure the low air flow, we should enlarge the air drag force and the output signal at the given air flow. The paddle structure is applied to the device, and the device is vertically located against the air flow to magnify the air drag force. We also adapt the corrugation structure to improve the output signals on the given air velocity. The device structure is made up of the silicon nitride layer and the output signal is measured with the piezoresistive layer. The output signals from the corrugated device show the better measurement sensitivity and the response time than that of flat one. The repeated measurement also shows the stabilized signals.
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참고문헌 (19)
참고문헌 신청
/ / http://www.efunda.com/designstandards/sensors/stra in_gages/strain_gage_sensitivity.cfm
C. Sosna / 2010 / A temperature compensation circuit for thermal flow sensor operated in constant-temperature-difference mode / IEEE Trans. Instrum. Meas 59 (6) : 1715 ~ 1721
C. Y. Lee / 2009 / Design and characterization of MEMS-based flow-rate and flow-direction microsensor / Microfluid Nanofluid 6 (3) : 363 ~ 371
D. P. Martin / 2002 / Evaluation of a prototype thermal anemometer foruse in low Air-speed drying measure calculations / Flow Meas. Instrum 12 (5) : 285 ~ 396
F. Ke / 2009 / A wafer-scale encapsulated RF MEMS switch with a stressreduced corrugated diaphragm / Sens. Actuators A 151 (2) : 237 ~ 243
C. Y. Lee / 2009 / Design and characterization of MEMS-based flow-rate and flow-direction microsensor / Microfluid Nanofluid 6 (3) : 363 ~ 371
D. P. Martin / 2002 / Evaluation of a prototype thermal anemometer foruse in low Air-speed drying measure calculations / Flow Meas. Instrum 12 (5) : 285 ~ 396
F. Ke / 2009 / A wafer-scale encapsulated RF MEMS switch with a stressreduced corrugated diaphragm / Sens. Actuators A 151 (2) : 237 ~ 243
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