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The reaction kinetics of the growth of Ni germanide in the Ni/Zr-interlayer/Ge system was investigated using isothermal in situ annealing at three different temperatures in a transmission electron microscope. The growth rate of Ni germanide in the Ni/Zr-interlayer/Ge system was determined to be diffusion controlled and depended on the square root of the time, with the activation energy of 1.04±0.04 eV. For the Ni/Zr-interlayer/Ge system, no intermediate or intermixing layer between the Zr-interlayer and Ge substrate was formed, and thus the Ni germanide was formed and grew uniformly due to Ni diffusion through the diffusion path created in the amorphous Zr-interlayer during the annealing process in the absence of any intermetallic compounds. The reaction kinetics in the Ni/Zr-interlayer/Ge system was affected only by the Zr-interlayer.
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참고문헌 (11)
참고문헌 신청
Balakrisnan B / 2005 / Texture of NiGe on Ge(001) and its evolution with formation temperature / Appl. Phys. Lett 87 : 241922 ~
Cotts E J / 1986 / Calorimetric study of amorphization in planar, binary, multilayer, thin-film diffusion couples of Ni and Zr / Phys. Rev. Lett 57 : 2295 ~ 2298
DeAvillez R R / 1990 / Quantitative investigation of titanium/amorphous-silicon multilayer thin film reactions / J. Mater. Res 5 : 593 ~ 600
Hsu S L / 2005 / Study of thermal stability of nickel monogermanide on single- and polycrystalline germanium substrates / Appl. Phys. Lett 86 : 251906 ~
Jae-Wook Lee / 2007 / In-Situ Annealing Study on the Thermal Stability of Nickel Germanides / Journal of the Korean Physical Society 50 (3) : 677 ~ 680
Cotts E J / 1986 / Calorimetric study of amorphization in planar, binary, multilayer, thin-film diffusion couples of Ni and Zr / Phys. Rev. Lett 57 : 2295 ~ 2298
DeAvillez R R / 1990 / Quantitative investigation of titanium/amorphous-silicon multilayer thin film reactions / J. Mater. Res 5 : 593 ~ 600
Hsu S L / 2005 / Study of thermal stability of nickel monogermanide on single- and polycrystalline germanium substrates / Appl. Phys. Lett 86 : 251906 ~
Jae-Wook Lee / 2007 / In-Situ Annealing Study on the Thermal Stability of Nickel Germanides / Journal of the Korean Physical Society 50 (3) : 677 ~ 680
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