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Transmission electron microscopy (TEM) is a powerful tool for analyzing a broad range of materials and provides localized information about the microstructure. However, the analysis results are strongly influenced by the quality of the thin foil specimen. Sample preparation for TEM analysis requires considerable skill, especially when the area of interest is small or the material of interest is diffi cult to thin because of its high hardness and its mechanical instability when thinned. This article selectively reviews recent advances in TEM sample preparation techniques using a tripod polisher. In particular, it introduces two typical types (flat type and wedge type) of TEM sample preparation and the benefits and drawbacks of each method; finally, a method of making better samples for TEM analysis is suggested.
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참고문헌 (10)
참고문헌 신청
Ayache J / 2010 / Sample Preparation Handbook for Transmission Electron Microscopy: Techniques / Springer
Barna A / 1997 / Sample preparation techniques for TEM Handbook for Microscopy Vol 3 Applications / Wiley-VCH Verlag GmbH :751~801
Chen J / 2002 / Preparation of metallized GaN/sapphire cross sections for TEM analysis using wedge polishing / Micron 33:489~492
Goodhew P J / 1985 / Thin Foil Preparation for Transmission Electron Microscopy / Elsevier
Hirsch P B / 1965 / Electron Microscopy of Thin Crystals / Butterworths
Barna A / 1997 / Sample preparation techniques for TEM Handbook for Microscopy Vol 3 Applications / Wiley-VCH Verlag GmbH :751~801
Chen J / 2002 / Preparation of metallized GaN/sapphire cross sections for TEM analysis using wedge polishing / Micron 33:489~492
Goodhew P J / 1985 / Thin Foil Preparation for Transmission Electron Microscopy / Elsevier
Hirsch P B / 1965 / Electron Microscopy of Thin Crystals / Butterworths
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