지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
이용수
초록· 키워드
오류제보하기
High resolution measurements of the carrier profile in semiconductor devices is required as the semiconductor industry progresses from the 10-nm lithography node to 7-nm and beyond. We examine the factors which determine the resolution of the present method of scanning spreading resistance microscopy as well as such factors for the newer method of scanning frequency comb microscopy that is now under development. Also, for the first time, we consider the sensitivity of both methods to the location of heterogeneities in the semiconductor. In addition, mesoscopic effects on these measurements are considered for the first time. Two simple analytical models are extended to study the sensitivity to heterogeneities as well as mesoscopic effects.
목차
등록된 정보가 없습니다.
참고문헌 (22)
참고문헌 신청
Avotina Ye S / 2005 / Method to determine defect positions below a metal surface by STM / Phys. Rev. B 71:115430
Chien A A / 2013 / Moore’s Law: the first ending and a new beginning / Computer (IEEE) 46:48~53
de Jong M J M / 1994 / Transition from Sharvin to Drude resistance in high-mobility wires / Phys. Rev. B 49:7778~7781
Dickens L E / 1967 / Spreading resistance as a function of frequency / IEEE Trans. Microwave Theory Tech 15:101~109
Dunham S T / 1994 / Improved analysis of spreading resistance measurements / J. Vac. Sci. Technol. B 12:283~289
Chien A A / 2013 / Moore’s Law: the first ending and a new beginning / Computer (IEEE) 46:48~53
de Jong M J M / 1994 / Transition from Sharvin to Drude resistance in high-mobility wires / Phys. Rev. B 49:7778~7781
Dickens L E / 1967 / Spreading resistance as a function of frequency / IEEE Trans. Microwave Theory Tech 15:101~109
Dunham S T / 1994 / Improved analysis of spreading resistance measurements / J. Vac. Sci. Technol. B 12:283~289
함께 읽어보면 좋을 논문
논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!
-
High-speed Two-photon Laser Scanning Microscopy Imaging of in vivo Blood Cells in Rapid Circulation at Velocities of Up to 1.2 Millimeters per Second
Current Optics and Photonics
2018 .12
-
Scanning ion conductance microscopy in biology
한국진공학회 학술발표회초록집
2016 .08
-
Scanning Electrochemical Microscopy 기반 에너지 응용 분야에 대한 전기화학적 반응 측정분석
한국분석과학회 학술대회
2024 .11
-
3D analysis of material using scanning electron microscopy and focused ion beam
한국분석과학회 학술대회
2017 .05
-
Scanning probe microscopy studies of ultrathin ferroelectric films for next electronic devices
한국진공학회 학술발표회초록집
2017 .08
-
분광기능이 융합된 광전자융합현미경의 개발
한국진공학회 학술발표회초록집
2020 .08
-
Monitoring of nucleus changes upon cell death using atomic force microscopy and ion conductance microscopy
한국진공학회 학술발표회초록집
2016 .08
-
Scanning tunneling microscopy studies on water-intercalated graphene
한국진공학회 학술발표회초록집
2016 .08
-
Controlling Spin State of Magnetic Molecules by Oxygen Binding Studied Using Scanning Tunneling Microscopy
한국진공학회 학술발표회초록집
2016 .02
-
원자단위 주사투과전자현미경을 이용한 산화물의 이해와 4차원 주사투과전자현미경학의 미래
물리학과 첨단기술
2023 .09
-
Investigation of micro-magnetic structures by using scanning transmission X-ray microscopy
한국자기학회 학술연구발표회 논문개요집
2017 .05
-
Proximity scanning transmission electron microscopy/spectroscopy
한국진공학회 학술발표회초록집
2016 .08
-
Wideband Reconfigurable Instantaneous Microwave Multi-frequency Measurement System Based on an Optical Frequency Shifter and Optical Frequency Comb
Current Optics and Photonics
2025 .02
-
Reconstruction of Neural Circuits Using Serial Block-Face Scanning Electron Microscopy
한국현미경학회지
2016 .01
-
Femtosecond time-resolved scanning tunneling microscopy and its applications
한국진공학회 학술발표회초록집
2016 .08
-
Computer simulation for non-contact atomic force microscopy
한국진공학회 학술발표회초록집
2016 .08
-
Single crystal graphene synthesis on oxidation Cu foil by CVD
한국진공학회 학술발표회초록집
2017 .08
-
Scanning tunneling microscopy of stripe features on a cleaved Bi₂Se₃ surface
한국진공학회 학술발표회초록집
2016 .08
-
Development of an Alignment Method for Retarders in isoSTED Microscopy
Current Optics and Photonics
2024 .08
-
Nano-scale superconducting contacts studied by scanning tunneling microscopy
한국진공학회 학술발표회초록집
2016 .08
이 논문의 저자 정보
최근 본 자료
댓글(0)
0