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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.24 No.6
- 발행연도
- 2015.11
- 수록면
- 273 - 277 (5page)
이용수
초록· 키워드
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We investigated secondary electron emission characteristics of ZnO thin films prepared by pulsed laser deposition method with respect to the ambient oxygen pressure and the substrate temperature during the deposition. X-ray diffraction, UV-Vis spectrometry, atomic force microscopy, and γ-FIB were used to examine the structural, optical transmission, surface morphology, and secondary electron emission properties of the films, respectively. The secondary electron emission coefficient of the ZnO films increases as the O/Zn ratio of the films increases which was thought to result from either the ambient oxygen pressure increase or the substrate temperature decrease and as the grain size of the films decreases. It was confirmed that ZnO has better secondary electron emission characteristics than those of MgO, which is currently widely used as a material for PDP protecting layers.
목차
Abstract
Ⅰ. Introduction
Ⅱ. Experimental
Ⅲ. Results and Discussion
Ⅳ. Conclusions
References
참고문헌 (18)
참고문헌 신청
[학술지(정기간행물)] - M. O. Aboelfotoh / 1982 / / IEEE Trans. Electron Devices ED-29 (2) : 247 ~
[학술지(정기간행물)] - Tsutae Shinoda / 1979 / / IEEE Trans. Electron Devices ED-26 (8) : 1163 ~
[학술지(정기간행물)] - Suk Joo Bae / 2008 / / IEEE Trans. Reliability 57 (2) : 222 ~
[학술지(정기간행물)] - Sang Jik Kwon / 2006 / / Jpn. J. Appl. Phys 45 (11) : 8709 ~
[학술지(정기간행물)] - Jae Hwan Eun / 2003 / / Thin Solid Films 435 : 199 ~
[학술지(정기간행물)] - Tsutae Shinoda / 1979 / / IEEE Trans. Electron Devices ED-26 (8) : 1163 ~
[학술지(정기간행물)] - Suk Joo Bae / 2008 / / IEEE Trans. Reliability 57 (2) : 222 ~
[학술지(정기간행물)] - Sang Jik Kwon / 2006 / / Jpn. J. Appl. Phys 45 (11) : 8709 ~
[학술지(정기간행물)] - Jae Hwan Eun / 2003 / / Thin Solid Films 435 : 199 ~
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UCI(KEPA) : I410-ECN-0101-2019-420-001275800