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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Journal of Korean Vacuum Science & Technology Journal of Korean Vacuum Science & Technology Vol.4 No.2
- 발행연도
- 2000.6
- 수록면
- 55 - 60 (6page)
이용수
초록· 키워드
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Vertically aligned carbon nanotubes on nickel coated glass substrates were obtained at low temperatures below 600℃ by plasma enhanced hot filament chemical vapor deposition where acetylene gas was used as the carbon source and ammonia gas was used as the dilution gas and catalyst. The diameters of the nanotubes decreased from 96 ㎚ to 41 ㎚ as NH₃/C₂H₂ ratio increased from 2:1 to 5:1. Total flow rate of input gases with constant NH₃/C₂H₂ ratio did not change the diameter of carbon nanotubes. No growth of the carbon nanotubes was observed with only C₂H₂ nor N₂ instead of NH₃. G line and D line in Raman spectra were observed, which implies that there were many structural defects in carbon nanotubes.
목차
Abstract
Ⅰ. Introduction
Ⅱ. Experiments
Ⅲ. Results and Discussion
Ⅳ. Conclusion
Acknowledgement
References
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