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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.28 No.4
- 발행연도
- 2019.7
- 수록면
- 113 - 121 (9page)
- DOI
- 10.5757/ASCT.2019.28.4.113
이용수
초록· 키워드
오류제보하기
The microplasma system that uses a stripline resonator is a promising plasma system because, capitalizing on the resonance property of the plasma source, it can readily generate plasma under atmospheric conditions without the assistance of an additional matching network. However, precise determination of the resonance frequency before device manufacturing is very important in practice. Therefore, the evolution trends of the resonance frequency of the discharge have to be investigated, based on source impedance analysis, to get an insight into the discharge matching condition. In this paper, a means of determining the discharge source impedance, called conformal mapping, and its application to the microwave parallel stripline resonator discharge source is presented and discussed.
목차
Abstract
Ⅰ. Introduction
Ⅱ. Theory
Ⅲ. Calculation result and discussion
Ⅳ. Conclusions
References
참고문헌 (13)
참고문헌 신청
J. Choi / 2009 / Plasma Sources Sci. Technol 18:025029
M. R. Spiegel / 1972 / Schaum’s Outline of Theory and Problems of Complex Variables: With an Introduction to Conformal Mapping and Its Applications / McGraw-Hill Book Co
R. Schinzinger / 2003 / Conformal Mapping:Methods and Applications / Dover Publications
N. Papamichael / 2010 / Numerical Conformal Mapping: Domain De-Composition and the Mapping of Quadrilaterals / World Scientific Pub Co Inc
R. Igreja / 2004 / Sens. Actuat. A : Phys 112:291
M. R. Spiegel / 1972 / Schaum’s Outline of Theory and Problems of Complex Variables: With an Introduction to Conformal Mapping and Its Applications / McGraw-Hill Book Co
R. Schinzinger / 2003 / Conformal Mapping:Methods and Applications / Dover Publications
N. Papamichael / 2010 / Numerical Conformal Mapping: Domain De-Composition and the Mapping of Quadrilaterals / World Scientific Pub Co Inc
R. Igreja / 2004 / Sens. Actuat. A : Phys 112:291
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UCI(KEPA) : I410-ECN-0101-2019-420-001277602