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The characteristics of a titanium oxide layer prepared using a plasma electrolytic oxidation (PEO) process were investigated, using an extended gate ion sensitive field effect transistor (EG-ISFET) to confirm the layer’s capability to react with hydrogen ions. The surface morphology and element distribution of the PEO-processed titanium oxide were observed and analyzed using field-emission scanning-electron microscopy (FE-SEM) and energy-distribution spectroscopy (EDS). The titanium oxide prepared by the PEO process was utilized as a hydrogen-ion sensing membrane and an extended gate insulator. A commercially available n-channel enhancement MOSFET (metal-oxide-semiconductor FET) played a role as a transducer. The responses of the PEO-processed titanium oxide to different pH solutions were analyzed. The output drain current was linearly related to the pH solutions in the range of pH 4 to pH 12. It was confirmed that the titanium-oxide layer prepared by the PEO process could feasibly be used as a hydrogen-ion-sensing membrane for EGFET measurements.
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참고문헌 (22)
참고문헌 신청
P. Bergveld / 1970 / Development of an Ion-Sensitive Solid-State Device for Neurophysiological Measurements / IEEE Trans. Biomed. Eng. BME-17:70~71
B. -K. Sohn / 1996 / A new pH-ISFET based dissolved oxygen sensor by employing electrolysis of oxygen / Sens. Actuators, B 34(1-3):435~440
B. -K. Sohn / 1997 / ISFET glucose and sucrose sensors by using platinum electrode and photo-crosslinkable polymers / Sens. Actuators, B 41(1-3):7~11
L. -S. Park / 1996 / Effect of membrane structure on the performance of field-effect transistor potassium-sensitive sensor / Sens. Actuators, A 57(3):239~243
P. Bergveld / 2003 / Thirty years of ISFETOLOGY : What happened in the past 30 years and what may happen in the next 30 years / Sens. Actuators, B 88(1):1~20
B. -K. Sohn / 1996 / A new pH-ISFET based dissolved oxygen sensor by employing electrolysis of oxygen / Sens. Actuators, B 34(1-3):435~440
B. -K. Sohn / 1997 / ISFET glucose and sucrose sensors by using platinum electrode and photo-crosslinkable polymers / Sens. Actuators, B 41(1-3):7~11
L. -S. Park / 1996 / Effect of membrane structure on the performance of field-effect transistor potassium-sensitive sensor / Sens. Actuators, A 57(3):239~243
P. Bergveld / 2003 / Thirty years of ISFETOLOGY : What happened in the past 30 years and what may happen in the next 30 years / Sens. Actuators, B 88(1):1~20
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