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논문 기본 정보

자료유형
학술저널
저자정보
저널정보
한국센서학회 센서학회지 센서학회지 제29권 제1호
발행연도
2020.1
수록면
33 - 39 (7page)

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Typically, photoacoustic images are obtained in water or gelatin because the impedance of these mediums is similar to that of the human body. However, these acoustic mediums can have an additional mass effect that changes the resonance frequency of the transducer. The acoustic radiation impedance in air is negligible because it is very small compared to that of the transducer. However, the high acoustic impedance of mediums such as the human body and water is quite large compared to that of air, making it difficult to ignore. Specifically, in a case where the equivalent mass is very small, such as with a micro-machined ultrasound transducer, the additional mass effects of the acoustic medium should be considered for an accurate resonance frequency design. In this study, a piezoelectric micro-machined ultrasonic transducer (pMUT) was designed to have a resonance frequency of 10 MHz in the acoustic medium of water, which has similar impedance as thehuman body. At that time, the resonance frequency of the pMUT in air was calculated at 15.2 MHz. When measuring the center displacement of the manufactured pMUT using a laser vibrometer, the resonance frequencies were measured as 14.3–15.1 MHz, which is consistent with the finite element method (FEM) simulation results. Finally, photoacoustic images of human hair samples were successfully obtained using the fabricated pMUT.

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