다결정 실리콘 웨이퍼 직접제조에 대한 공정변수 영향

위성민; 이진석; 장보윤; 김준수; 안영수; 윤우영

추천

검색

자료유형: 학술저널

저자정보: 위성민 (한국에너지기술연구원 에너지융합소재연구단) 이진석 (한국에너지기술연구원 에너지융합소재연구단) 장보윤 (한국에너지기술연구원 에너지융합소재연구단) 김준수 (한국에너지기술연구원 에너지융합소재연구단) 안영수 (한국에너지기술연구원 에너지융합소재연구단) 윤우영 (고려대학교 신소재공학부)

저널정보: 한국주조공학회 한국주조공학회지 (주조) 한국주조공학회지 제33권 제4호

발행연도: 2013.1

수록면: 157 - 161 (5page)

이용수

📌

연구주제

📖

연구배경

🔬

연구방법

🏆

연구결과

초록· 키워드

오류제보하기

A ribbon-type polycrystalline silicon wafer was directly fabricated from liquid silicon via a novel technique for both a fast growth rate and large grain size by exploiting gas pressure. Effects of processing parameters such as moving speed of a dummy bar and the length of the solidification zone on continuous casting of the silicon wafer were investigated. Silicon melt extruded from the growth region in the case of a solidification zone with a length of 1cm due to incomplete solidification. In case of a solidification zone wieh a length of 2 cm, on the other hand, continuous casting of the wafer was impossible due to the volume expansion of silicon derived from the liquid-solid transformation in solidification zone. Consequently, the optimal length of the solidification zone was 1.5 cm for maintaining the position of the solid-liquid interface in the solidification zone. The silicon wafer could be continuously casted when the moving speed of the dummy bar was 6 cm/min, but liquid silicon extruded from the growth region without solidification when the moving speed of the dummy bar was ${\geq}$ 9 cm/min. This was due to a shift of the position of the solid-liquid interface from the solidification zone to the moving area. The present study reports experimental findings on a new direct growth system for obtaining silicon wafers with both high quality and productivity, as a candidate for an alternate route for the fabrication of ribbon-type silicon wafers.

#Solar cell #Silicon #Wafer #Solidification #Interface

참고문헌 (11)

참고문헌 신청

A.M. Lipinski / 2003 / The Industrial technology of crystalline silicon solar cells / Adv. Mater 5:1365~1371

Lee GH / 2006 / A Study on the fabrication of polycrystalline Si Wafer by direct casting for solar cell substrate / Solar Energy 80:220~225

D. S. Ruby / 2000 / Plasma texturization for multicrystalline solar cells / PVSC 28:75~78

Lee WS / 2007 / PC1D simulation for optimization of single crystalline silicon solar cell / J. Korean Inst. Electri. Electron.Mater. Eng. :57~58

Jang BY / 2010 / Low-Cost polusilicon technologies for photovoltaics / Ceramist 13:41~46