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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.29 No.6
- 발행연도
- 2020.11
- 수록면
- 190 - 194 (5page)
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The fast and accurate measurement of the thickness of multiple oxide/nitride layer deposition (MOLD) films is desirable to improve the quality of the plasma deposition process and potentially simplify the metrology in 3D NAND flash memory devices. In this study, we performed deep neural network modeling of the reflectance spectrum data of two pairs of oxide/nitride films on a silicon substrate. We designed a deep neural network model to estimate the thickness of four stacked thin-film layers and the MOLD film. Principle component analysis of this model was performed to develop another model with 27 features. Finally, a combined model was designed by fine tuning both the models and applying an ensemble algorithm to both. The mean absolute error of the combined predictive model was lower than that of the individual models. We verified the performance of the proposed model by considering the thin-film deposition mechanism with respect to the infrared reflectance metrology of MOLD thin films. This study demonstrates the potential of machine learning for predicting the thickness of multiple layered films, addressing the limitations of optical metrology.
목차
ABSTRACT
1. Introduction
2. Modeling
3. Results and discussion
4. Conclusions
References
참고문헌 (18)
참고문헌 신청
J. Lee / 2016 / Proceedings of the IEEE International Electron Devices Meeting :11.2.1~11.2.4
장동범 / 2018 / In-Situ Monitoring of Multiple Oxide/Nitride Dielectric Stack PECVD Deposition Process / Transactions on Electrical and Electronic Materials 19(1):21~26
A. Piegari / 1985 / Thin Solid Films 124:249
김가현 / 2019 / 수소화된 비정질 실리콘의 타원편광분광분석 측정 및 모델링 / 한국태양에너지학회 논문집 39(1):11~19
K. Vedam / 1998 / Thin Solid Films 313:1
장동범 / 2018 / In-Situ Monitoring of Multiple Oxide/Nitride Dielectric Stack PECVD Deposition Process / Transactions on Electrical and Electronic Materials 19(1):21~26
A. Piegari / 1985 / Thin Solid Films 124:249
김가현 / 2019 / 수소화된 비정질 실리콘의 타원편광분광분석 측정 및 모델링 / 한국태양에너지학회 논문집 39(1):11~19
K. Vedam / 1998 / Thin Solid Films 313:1
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