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논문 기본 정보

자료유형
학술저널
저자정보
Hasnain Yousuf (Sungkyunkwan University) Muhammad Quddamah Khokhar (Sungkyunkwan University) Sanchari Chowdhury (Sungkyunkwan University) Duy Phong Pham (Sungkyunkwan University) Youngkuk Kim (Sungkyunkwan University) Minkyu Ju (Sungkyunkwan University) Younghyun Cho (Sungkyunkwan University) Eun-Chel Cho (Sungkyunkwan University) Junsin Yi (Sungkyunkwan University)
저널정보
한국태양광발전학회 Current Photovoltaic Research Current Photovoltaic Research Vol.9 No.3
발행연도
2021.9
수록면
75 - 83 (9page)

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The tunnel oxide passivated contact (TOPCon) structure got more consideration for development of high performance solar cells by the introduction of a tunnel oxide layer between the substrate and poly-Si is best for attaining interface passivation. The quality of passivation of the tunnel oxide layer clearly depends on the bond of SiO in the tunnel oxide layer, which is affected by the subsequent annealing and the tunnel oxide layer was formed in the suboxide region (SiO, Si₂O, Si₂O₃) at the interface with the substrate. In the suboxide region, an oxygen-rich bond is formed as a result of subsequent annealing that also improves the quality of passivation. To control the surface morphology, annealing profile, and acceleration rate, an oxide tunnel junction structure with a passivation characteristic of 700 mV or more (V<SUB>oc</SUB>) on a p-type wafer could achieved. The quality of passivation of samples subjected to RTP annealing at temperatures above 900°C declined rapidly. To improve the quality of passivation of the tunnel oxide layer, the physical properties and thermal stability of the thin layer must be considered. TOPCon silicon solar cell has a boron diffused front emitter, a tunnel-SiO<SUB>x</SUB>/n<SUP>+</SUP>-poly-Si/ SiN<SUB>x</SUB>:H structure at the rear side, and screen-printed electrodes on both sides. The saturation currents J<SUB>o</SUB> of this structure on polished surface is 1.3 fA/㎠ and for textured silicon surfaces is 3.7 fA/㎠ before printing the silver contacts. After printing the Ag contacts, the Jo of this structure increases to 50.7 fA/㎠ on textured silicon surfaces, which is still manageably less for metal contacts. This structure was applied to TOPCon solar cells, resulting in a median efficiency of 23.91%, and a highest efficiency of 24.58%, independently. The conversion efficiency of interdigitated back-contact solar cells has reached up to 26% by enhancing the optoelectrical properties for both-sides-contacted of the cells.

목차

ABSTRACT
1. Introduction
2. Fabrication of TOPCon solar cells
3. Background of the Progress
4. TOPCon Solar Cell Structure
5. Process of TOPCon Solar Cell
6. Conclusions
References

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