High performance KNN-based single crystal thick film for ultrasound application

Tao Zhang; Jun Ou-Yang; Xiaofei Yang; Wei Wei; Benpeng Zhu

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자료유형: 학술저널

저자정보: Tao Zhang (Huazhong University of Science and Technology) Jun Ou-Yang (Huazhong University of Science and Technology) Xiaofei Yang (Huazhong University of Science and Technology) Wei Wei (Henan University of Science and Technology China) Benpeng Zhu (Huazhong University of Science and Technology)

저널정보: 대한금속·재료학회 Electronic Materials Letters Electronic Materials Letters Vol.15 No.1

발행연도: 2019.1

수록면: 1 - 6 (6page)

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Using a novel lapping technology, the achievement of approximately 28 μm (K 0.45 Na 0.55 ) 0.96 Li 0.04 NbO 3 (abbreviated asKNLN) single crystal thick fi lm with <001> orientation has been realized. This kind of thick fi lm exhibited excellent electricalperformance: a superior piezoelectric constant (~ 490 pm/V) and an outstanding electromechanical coupling coeffi cient(k t ~ 0.55). Based on the obtained KNLN single crystal thick fi lm, a tiny side-looking 82 MHz ultrasound transducer witha bandwidth of 57.3% at − 6 dB has been successfully fabricated. Most importantly, 80 MHz intravascular ultrasound andphotoacoustic images of the healthy rabbit aorta have been presented. All these promising results indicate that KNN-basedsingle crystal thick fi lm is a good environmental protection candidate for high frequency (~ 80 MHz) ultrasound applications.

#KNN-based single crystal · Thick fi lm · Piezoelectric property · Electromechanical coupling coeffi cient · Ultrasound

참고문헌 (25)

참고문헌 신청

Hwang, G. T. / 2014 / Self-powered cardiac pacemaker enabled by fl exible single crystalline PMN-PT piezoelectric energy harvester / Adv. Mater 26:4880

Hwang, G. T. / 2015 / Flexible piezoelectric thin-fi lm energy harvesters and nanosensors for biomedical applications / Adv. Mater 4:646

Liang, R. J. / 2015 / High sensitivity piezoelectric sensors using fl exible PZT thick-fi lm for shock tube pressure testing / Sens. Actuators A. Phys 235:317

Zhu, B. P. / 2010 / Lift-off PMN–PT thick fi lm for high-frequency ultrasonic biomicroscopy / J. Am. Ceram. Soc 93:2929

Zhu, B. P. / 2013 / New fabrication of high-frequency (100-MHz) ultrasound PZT fi lm kerfl ess linear array / IEEE Trans. Ultrason. Ferroelectr. Freq. Control 60:854

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