Enhancement of Mechanical and Thermal Properties of SU‑8 Photoresist with Multilayer Woven Glass Fabric Based on Micromachining Technology

Wenwen Zhou; Yahui Li; Yunna Sun; Jinyuan Yao; Xutong Song; Guifu Ding

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자료유형: 학술저널

저자정보: Wenwen Zhou (Shanghai Jiao Tong University) Yahui Li (Shanghai Jiao Tong University) Yunna Sun (Shanghai Jiao Tong University) Jinyuan Yao (Shanghai Jiao Tong University) Xutong Song (Shanghai Jiao Tong University) Guifu Ding (Shanghai Jiao Tong University)

저널정보: 대한금속·재료학회 Electronic Materials Letters Electronic Materials Letters Vol.16 No.6

발행연도: 2020.1

수록면: 604 - 614 (11page)

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SU-8 photoresist has been more and more widely used as a structural material in micro electromechanical system (MEMS) because of its low cost and excellent biocompatibility. However, the inferior mechanical and thermal performances immensely impinge the reliability of the MEMS device based SU-8 and accordingly restrict its application. Here we report the mechanicaland thermal performance of SU-8 reinforced by the multilayer glass fabric with the MEMS technology. The finite element simulation and specific experiment are conducted, which confirm that the reinforced SU-8 composites have a 281% increase in Young’s modulus and a 64% decrease in coefficient of thermal expansion (CTE) compared with pure SU-8. Additionally,the improved mechanism has also been analyzed, including the excellent interface bonding between the SU-8 and glass fabric, and the high-bond energy of Si–O-Si chain structures in glass fabric. Furthermore, the glass fabric reinforced SU-8 could still possess a high light transmittance to maintain the ability of lithography patterning. Therefore, it is believed thatthe strategy proposed here may satisfy higher requirements of MEMS devices, which guarantees its practical applications in the functional microstructures.

#MEMS structural material · Multilayer woven glass fabric enhanced SU-8 · Young's modulus · Coefficient of thermal expansion (CTE)

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