Influence of Deposition Parameters on the Structure and Optical Property of Zn(S,O) Films

Du-Cheng Tsai; Bing-Hau Kuo; Zue-Chin Chang; Erh-Chiang Chen; Fuh-Sheng Shieu

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자료유형: 학술저널

저자정보: Du-Cheng Tsai (National Chung Hsing University) Bing-Hau Kuo (National Chung Hsing University) Zue-Chin Chang (National Chin-Yi University of Technology) Erh-Chiang Chen (National Chung Hsing University) Fuh-Sheng Shieu (National Chung Hsing University)

저널정보: 대한금속·재료학회 Metals and Materials International Metals and Materials International Vol.23 No.1

발행연도: 2017.1

수록면: 163 - 169 (7page)

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This paper presents the influence of process parameters, including sputtering power, oxygen partial pressure (RO), and substrate temperature on the optical property of Zn(S,O) thin films fabricated by radio frequency magnetron sputtering technology and deposited on glass substrates. The chemical composition, structural and optical properties of the samples were investigated by electron spectroscopy for chemical analysis, X-ray diffraction, and spectrophotometer. All the films mainly exhibited β-ZnS phase with (111) preferred orientation. [S]/([S]+[O]) ratio increased at high sputtering power, low RO, and low substrate temperature. Moderate ranges in sputtering power and substrate temperature and low RO resulted in large grain size. Adatoms are expected to exhibit increased mobility under these conditions. Average transmittance exceeded 75% in the visible wavelength region. Bandgap under these conditions was dominated strongly by the change in grain size and [S]/([S]+[O]) ratio. Optical properties of Zn(S,O) thin films could be modified, which is promising for optoelectronic applications.

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참고문헌 신청

X. Fan / 2009 / Advanced Photonic Structures for Biological and Chemical Detection / Springer

K. Wang / 2010 / Appl. Phys. Lett 96:123105

C. Jin / 2010 / J. Lumin 130:516

L. Zhang / 2014 / J. Phys. D : Appl. Phys 47:455101

F. Pan / 2014 / Mat. Sci. Eng. R 83:1

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