지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.21 No.6
- 발행연도
- 2021.12
- 수록면
- 418 - 426 (9page)
- DOI
- 10.5573/JSTS.2021.21.6.418
이용수
초록· 키워드
오류제보하기
This paper presents a new coupling spring design for the MEMS tuning fork structure. The spring design incorporates the outer arm, inner arm, and torsional arm. The outer and inner arms are connected through the torsional arm to be rotationally symmetric, constituting 180° in relation to the center of spring. The designed coupling spring always prioritizes an anti-phase motion providing robustness to linear acceleration. The operation of the spring was validated through FEM simulations and experimental results. The experimental results demonstrated that the anti-phase resonant frequency was 27,280 Hz, whereas the in-phase resonant frequency was 27,780 Hz. Furthermore, the designed coupling spring benefited from a narrow etch cavity and small surface area, making it an ideal design for consumer electronics applications.
목차
Abstract
I. INTRODUCTION
II. THE DESIGN CONCEPT OF THE MEMS TUNING FORK RESONATOR
III. FEM SIMULATIONS
IV. EXPERIMENTAL RESULTS
V. CONCLUSION
REFERENCES
참고문헌 (23)
참고문헌 신청
F. Iqbal, H. Din, and B. Lee, "Single Drive Multi-Axis Gyroscope with High Dynamic Range, High Linearity and Wide Bandwidth," Micromachines, vol. 10, p. 410, 2019.
F. Iqbal, M. A. Shah, and B. Lee, "Analysis of parasitic feed-through capacitance in MEMS gyroscope with push pull configuration," in 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2017, pp. 414-417.
A. Walther, C. Le Blanc, N. Delorme, Y. Deimerly, R. Anciant, and J. Willemin, "Bias contributions in a MEMS tuning fork gyroscope," Journal of microelectromechanical systems, vol. 22, pp. 303-308, 2012.
F. Iqbal and B. Lee, "A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators," Micromachines, vol. 9, p. 173, 2018.
T.-A. W. Roessig, "Integrated MEMS tuning fork oscillators for sensor applications," 1999.
F. Iqbal, M. A. Shah, and B. Lee, "Analysis of parasitic feed-through capacitance in MEMS gyroscope with push pull configuration," in 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2017, pp. 414-417.
A. Walther, C. Le Blanc, N. Delorme, Y. Deimerly, R. Anciant, and J. Willemin, "Bias contributions in a MEMS tuning fork gyroscope," Journal of microelectromechanical systems, vol. 22, pp. 303-308, 2012.
F. Iqbal and B. Lee, "A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators," Micromachines, vol. 9, p. 173, 2018.
T.-A. W. Roessig, "Integrated MEMS tuning fork oscillators for sensor applications," 1999.
이 논문의 저자 정보
이 논문과 함께 이용한 논문
최근 본 자료
댓글(0)
0