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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2020.8
- 수록면
- 293 - 301 (9page)
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초록· 키워드
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In this paper we propose and theoretically analyze a monolithic multiparametric sensor consisting of a superstructure of surface-relief waveguide Bragg gratings (WBGs), a micro-machined diaphragm, and a cantilever beam. Diaphragms of two different configurations, namely circular and square, are designed and analyzed separately for pressure measurement. The square diaphragm is then selected for further study, since it shows relatively higher sensitivity compared to the circular one, as it incurs more induced stress when any pressure is applied. The cantilever beam with a proof mass is designed to enhance the sensitivity for acceleration measurement. A unique mathematical method using coupled-mode theory and the transfer-matrix method is developed to design and analyze the shift in the Bragg wavelength of the superstructure configuration of the gratings, due to simultaneously applied pressure and acceleration. The effect of temperature on the wavelength shift is compensated by introducing another Bragg grating in the superstructure configuration. The measured sensitivities for pressure and acceleration are found to be 0.21 pm/Pa and 6.49 nm/g respectively.
목차
Ⅰ. INTRODUCTION
Ⅱ. SENSOR CONFIGURATION
Ⅲ. THEORY AND DESIGN
Ⅳ. RESULTS AND DISCUSSION
Ⅴ. CONCLUSION
REFERENCES
참고문헌 (19)
참고문헌 신청
A. D. Kersey / 1997 / Fiber grating sensors / J. Lightwave Technol 15:1442~1463
Y. Zhang / 2001 / High-sensitivity pressure sensor using a shielded polymer-coated fiber Bragg grating / IEEE Photonics Technol. Lett 13:618~619
H. J. Sheng / 2003 / A lateral pressure sensor using a fiber Bragg grating / Proc. Pacific Rim Conference on Lasers and Electro-Optics (CLEO) 2:674
A. R. Sankar / 2012 / Design, fabrication and testing of a high-performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures / Microsyst. Technol 18:9~23
D. Feng / 2015 / A fiber Bragg grating accelerometer based on a hybridization of cantilever beam / IEEE Sens. J 15:1532~1537
Y. Zhang / 2001 / High-sensitivity pressure sensor using a shielded polymer-coated fiber Bragg grating / IEEE Photonics Technol. Lett 13:618~619
H. J. Sheng / 2003 / A lateral pressure sensor using a fiber Bragg grating / Proc. Pacific Rim Conference on Lasers and Electro-Optics (CLEO) 2:674
A. R. Sankar / 2012 / Design, fabrication and testing of a high-performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures / Microsyst. Technol 18:9~23
D. Feng / 2015 / A fiber Bragg grating accelerometer based on a hybridization of cantilever beam / IEEE Sens. J 15:1532~1537
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