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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.23 No.1
- 발행연도
- 2023.2
- 수록면
- 1 - 7 (7page)
- DOI
- 10.5573/JSTS.2023.23.1.1
이용수
초록· 키워드
오류제보하기
Organic thin-film transistors (OTFTs) fabricated on a biocompatible Parylene-C substrate can be applied to biosensors using a simple and cost-effective process. In this study, we developed biocompatible OTFTs by using organic materials to fabricate the substrate, gate dielectric, channel, and passivation layer. Poly(3-hexylthiophene) (P3HT) was used to fabricate the OTFTs on a Parylene-C-based platform. As the gate dielectric, Parylene-C showed promising insulation properties. Finally, we generated a cyclic olefin polymer (COP) passivation layer to protect P3HT from oxygen and moisture, and the effect of the COP passivation layer on the P3HT channel was analyzed. The proposed materials and fabrication methods will be useful for various bio-applications of OTFTs.
목차
Abstract
I. INTRODUCTION
II. FABRICATION
III. RESULTS AND DISCUSSION
IV. CONCLUSION
REFERENCES
참고문헌 (17)
참고문헌 신청
Franz Werkmeister and Bert Nickel., " Towards flexible organic thin film transistors (OTFTs) for biosensing." Journal of Materials Chemistry B, 2013, 1, 3830-3835
Park, S. K., Kim, Y. H., Han, J. I., Moon, D. G., & Kim, W. K., "High-performance polymer TFTs printed on a plastic substrate." IEEE Transactions on Electron Devices 49.11 (2002): 2008-2015.
Choi, B. J., Kim, J. H., Yang, W. J., Han, D. J., Park, J., & Park, D. W., "Parylene-based flexible microelectrode arrays for the electrical recording of muscles and the effect of electrode size." Applied Sciences 10.20 (2020): 7364.
Park, D. W., Kim, H., Bong, J., Mikael, S., Kim, T. J., Williams, J. C., & Ma, Z., "Flexible bottom-gate graphene transistors on Parylene C substrate and the effect of current annealing." Applied Physics Letters 109.15 (2016): 152105
Fukuda, K., Suzuki, T., Kumaki, D., & Tokito, S., "Reverse DC bias stress shifts in organic thin‐film transistors with gate dielectrics using parylene‐ C." physica status solidi (a) 209.10 (2012): 2073-2077.
Park, S. K., Kim, Y. H., Han, J. I., Moon, D. G., & Kim, W. K., "High-performance polymer TFTs printed on a plastic substrate." IEEE Transactions on Electron Devices 49.11 (2002): 2008-2015.
Choi, B. J., Kim, J. H., Yang, W. J., Han, D. J., Park, J., & Park, D. W., "Parylene-based flexible microelectrode arrays for the electrical recording of muscles and the effect of electrode size." Applied Sciences 10.20 (2020): 7364.
Park, D. W., Kim, H., Bong, J., Mikael, S., Kim, T. J., Williams, J. C., & Ma, Z., "Flexible bottom-gate graphene transistors on Parylene C substrate and the effect of current annealing." Applied Physics Letters 109.15 (2016): 152105
Fukuda, K., Suzuki, T., Kumaki, D., & Tokito, S., "Reverse DC bias stress shifts in organic thin‐film transistors with gate dielectrics using parylene‐ C." physica status solidi (a) 209.10 (2012): 2073-2077.
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