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논문 기본 정보

자료유형
학술저널
저자정보
Ruoyan Wang (Nanjing University of Science and Technology) Ruihu Ni (Realsil Microelectronics) Zhishan Gao (Nanjing University of Science and Technology) Lingjie Wang (Chinese Academy of Sciences) Qun Yuan (Nanjing University of Science and Technology)
저널정보
한국광학회 Current Optics and Photonics Current Optics and Photonics Vol.7 No.2
발행연도
2023.4
수록면
213 - 221 (9page)

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초록· 키워드

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The optical window, as a part of the collimator system, is the connector between the outside light source and the optical system inside a vacuum tank. The temperature and pressure difference between the two sides of the optical window cause not only thermoelastic deformation, but also refractive-index irregularities. To suppress the influence of these two changes on the performance of the collimator system, thermo-optical analysis is employed. Coefficients that characterize the deformations and refractiveindex distributions are derived through finite-element analysis, and then imported into the collimator system using a user-defined surface in ZEMAX. The temperature and pressure difference imposed on the window seriously degrade the system performance of the collimator. A decentered and tilted lens group is designed to correct both field aberrations and the thermal effects of the window. Through lensinterval adjustment of the lens group, the diffraction-limited performance of the collimator can be maintained with a vacuum level of 10<SUP>−5</SUP> Pa and inside temperature ranging from −100 ℃ to 20 ℃.

목차

I. INTRODUCTION
II. METHOD
III. CONCLUSION
REFERENCES

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