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논문 기본 정보

자료유형
학술저널
저자정보
Junhyeong Ji (Myongji University) Jonghee Park (Myongji University) Jiseok Lee (Myongji University) Hwarang Baek (Myongji University) Youbean Kim (Myongji University)
저널정보
대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.25 No.1
발행연도
2025.2
수록면
41 - 49 (9page)
DOI
10.5573/JSTS.2025.25.1.41

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초록· 키워드

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The device power supply (DPS) utilized in automated test equipment (ATE) for semiconductor testing is responsible for applying and measuring voltage/current to the device under test (DUT). The choice of DPS in ATE can vary based on the equipment’s purpose, specifications, and the targeted DUT for measurement. Consequently, the efficiency of equipment development has been compromised due to different evaluation environments dictated by various DPS manufacturers. This paper addresses this challenge by proposing the establishment of a universally applicable evaluation environment for equipment development, independent of the operational specifications of DPS, leveraging field programmable gate arrays (FPGA). In this study, we initially design and validate an FPGAbased SPI communication module aligned with the specifications of Analog Devices’ AD5560, commonly applied in mass-produced semiconductor test equipment. Based on these results, we present a universal DPS evaluation environment that can be adapted to various DPS development scenarios.

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Abstract
Ⅰ. INTRODUCTION
Ⅱ. ARCHITECTURE
Ⅲ. METHODOLOGY
Ⅳ. MEASUREMENT RESULTS
Ⅴ. CONCLUSIONS
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