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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2026.5
- 수록면
- 36 - 44 (9page)
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초록· 키워드
This study quantifies the effect of Bosch-DRIE-induced scalloping on the thrust performance of axisymmetric micronozzles fabricated by DRIE. Numerical simulations showed that, for a throat diameter of 400 μm, thrust variation remained within 1% when the relative roughness parameter δ was ≤ 2.0%. For smaller throat diameters, the numerical results similarly showed that the effect of relative roughness on thrust remained below 1% within the investigated range. Micronozzles designed for target thrust levels of 50 mN and 100 mN (with throat diameters of 250 μm and 350 μm) were fabricated and experimentally tested. The measured relative roughness was approximately 0.5%, well below the range associated with noticeable thrust variation. Experimental results indicated that the observed thrust change was more closely related to the increase in throat diameter (0.8-0.9%) caused by wet etching than to scalloping itself. Overall, these findings provide practical guidance for establishing fabrication tolerances in the design of MEMS-based micronozzles.
#Micronozzle
#DRIE (Deep Reactive Ion Etching)
#Cold Gas Thruster
#Microthruster
#Thrust Measurement
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목차
- ABSTRACT
- 1. Introduction
- 2. Numerical Analysis
- 3. Fabrication and Experimental Verification
- 4. Conclusion
- References
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