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EDP Sciences BIO Web of Conferences 129
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    초록·키워드

    Sample preparation methods have an important role in transmission electron microscopy (TEM).New materials (ceramics, thin films, composites, etc.) that are now present have a specific property and have to be precisely treated and usually post-treated.This poses evernew challenges, constant adjustments, and improvements in advanced TEM preparation techniques like focused ion beam sample preparation, conventional sample preparation, and other TEM preparation methods.In this paragraph, we compared two nowadays most frequently used TEM sample preparation techniques; conventional sample preparation and focused ion beam sample preparation.TEM samples were, in the last stage of preparation, final-treated using NanoMill (model 1040, Fischione Instruments, Inc.) to achieve the best results for further TEM/STEM analysis.The study was created for a discussion about using different approaches to achieve the best result for the TEM sample preparation.The first TEM sample was prepared using FEI Helios NanoLab NL650 dual-beam Focused Ion Beam (FIB).The sample was finally treated (thinned and cleaned) with NanoMill under specific conditions for FIB-type samples.The second TEM sample was conventionally prepared.The sample was thinned, dimpled down to transparent thickness (Dimple grinder, Gatan Inc.), and ion-milled using PIPS (Precision Ion Polishing System, Gatan Inc.) to achieve perforation.In the last stage, the sample was finally treated with NanoMill under specific conditions for conventional-type sample preparation.We want to expose how important is to choose the proper technique and appropriate conditions for TEM sample preparation.Relative thickness study distinctly revealed improvement in sample quality that affects the final STEM investigations.

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