인문학
사회과학
자연과학
공학
의약학
농수해양학
예술체육학
복합학
DBpia AI
AI 에이전트
AI 아이디어
AI 리더
AI 뷰어
Citeasy
크롬 서지관리 다운로드
지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록·키워드
The working mechanism of resonant sensors is based on tracking the frequency shift in the linear vibration range. Contrary to the conventional paradigm, in this paper, we show that by tracking the dramatic frequency shift of the saddle-node bifurcation on the nonlinear parametric isolated branches in response to external forces, we can dramatically boost the sensitivity of MEMS force sensors. Specifically, we first theoretically and experimentally investigate the double hysteresis phenomena of a parametrically driven micromechanical resonator under the interaction of intrinsic nonlinearities and direct external drive. We demonstrate that the double hysteresis is caused by symmetry breaking in the phase states. The frequency response undergoes an additional amplitude jump from the symmetry-breaking-induced parametric isolated branch to the main branch, resulting in double hysteresis in the frequency domain. We further demonstrate that significant force sensitivity enhancement can be achieved by monitoring the dramatic frequency shift of the saddle-node bifurcations on the parametric isolated branches before the bifurcations annihilate. Based on the sensitivity enhancement effect, we propose a new sensing scheme which employs the frequency of the top saddle-node bifurcation in the parametric isolated branches as an output metric to quantify external forces. The concept is verified on a resonant MEMS charge sensor. A sensitivity of up to 39.5 ppm/fC is achieved, significantly surpassing the state-of-the-art resonant charge sensors. This work provides a new mechanism for developing force sensors of high sensitivity.
#Sensitivity (control systems)
#Physics
#Parametric statistics
#Nonlinear system
#Restoring force
#Bifurcation
#Symmetry breaking
#Hysteresis
#Resonator
#Control theory (sociology)
#Vibration
#Classical mechanics
#Acoustics
#Optics
#Computer science
#Electronic engineering
#Engineering
#Condensed matter physics
#Mathematics
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