인문학
사회과학
자연과학
공학
의약학
농수해양학
예술체육학
복합학
DBpia AI
AI 에이전트
AI 아이디어
AI 리더
AI 뷰어
Citeasy
크롬 서지관리 다운로드
지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록·키워드
In this article, a CMOS-compatible Pirani vacuum gauge was proposed featuring enhanced sensitivity, lower detection limit, and high-temperature stability, achieved through the implementation of a surface micromachining method coupled with a temperature compensation strategy. To improve performance, a T-type device with a 1 µm gap was fabricated resulting in an average sensitivity of 1.10 V/lgPa, which was 2.89 times larger than that (0.38 V/lgPa) of a L-type device with a 100 µm gap. Additionally, FEA simulations were conducted, analyzing the influence of heater temperature on sensitivity and the attenuation of sensitivity across varying ambient temperatures. A semi-empirical theoretical mode was derived for performance prediction, demonstrating strong alignment with experimental results, underscoring its effectiveness in compensating for sensitivity attenuation. Building on the foundation, the device's performance under different ambient temperatures was characterized and effectively compensated in two distinct operational modes: constant temperature mode and constant temperature difference mode (the whole range temperature compensation error can be controlled within 2.5%). Finally, the short-time stability (variation level is approximately 1 mV), noise floor (Vrms=384 μV) and detection limit (0.07 Pa @1 Hz) of the device were characterized, confirming its suitability for practical implementation.
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