Optical properties of silicon nitride films by plasma - enhanced chemical vapor deposition

Changhun Ko ,  Chlyoung Ham ,  Heesoo Han 외 6명

한국진공학회 학술발표회초록집

2004 .08

Characterization of Low-Temperature Graphene Growth with Plasma Enhanced Chemical Vapor Deposition

Yifei Ma ,  Daekyoung Kim ,  Guoqing Xin 외 1명

한국진공학회 학술발표회초록집

2012 .02

Silicon Thin-film Solar Cell Deposited by Using High Working Pressure Plasma-enhanced Chemical Vapor Deposition System

권정대 ,  남기석 ,  김동호

한국진공학회 학술발표회초록집

2015 .02

Double antireflection thin film by plasma enhanced chemical vapor deposition for silicon solar cell

Dongsung LEE

한국진공학회 학술발표회초록집

2016 .08

Interfaces properties of low dielectric constant SiOC(-H) films deposited by plasma enhanced chemical vapor deposition

Chang Young Kim ,  Heang Seuk Lee ,  Jong Kwan Woo 외 1명

한국진공학회 학술발표회초록집

2009 .08

Plasma Optical Signal Analysis for SiNx Plasma Enhanced Chemical Vapor Deposition Processes

Yooncheol Shin ,  Sun Jung Kim ,  Sangin Lee 외 1명

한국진공학회 학술발표회초록집

2019 .08

Mechanical properties of silicon nitride prepared by plasma enhanced chemical vapor deposition at low temperature as a function of dc bias voltage

Thuy T. T. Pham ,  J. H. Lee ,  I. K. Kim 외 1명

한국진공학회 학술발표회초록집

2007 .08

Low-temperature remote plasma-enhanced chemical deposition of SiOx thin films on organic substrate

김덕진 ,  황진영 ,  이내응

한국진공학회 학술발표회초록집

2005 .08

Correlation Analysis of Plasma Properties and Film Properties using Optical Emission Spectroscopy in Plasma Enhanced Chemical Vapor Deposition Processes of Silicon Nitride

Seunghun Han ,  Byung hyun Oh ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .08

Correlation Study between Optical Emission Spectroscopy Signals and Silicon Nitride Film Properties in Plasma Enhanced Chemical Vapor Deposition Processes

Seunghun Han ,  Sun Jung Kim ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Prediction of Silicon Nitride Film Properties by the Analysis of Optical Emission Spectroscopy Signals in Plasma Enhanced Chemical Vapor Deposition Processes

Sun Jung Kim ,  Seunghun Han ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Solid - phase crystallization of amorphous silicon films deposited by plasma - enhanced chemical vapor deposition

Jung-Keun Lee

Journal of Korean Vacuum Science & Technology

1998 .04

Effects of Post - Deposition Heat Treatment on the Properties of Low Dielectric Constant Plasma Polymerized Decahydronaphthalene Thin Films Deposited by Plasma - Enhanced Chemical Vapor Deposition

양재영 ,  심천만 ,  정동근

한국진공학회 학술발표회초록집

2001 .02

Multilayer barrier film fabricated by Plasma Enhanced Chemical Vapor Deposition and Atomic Layer Deposition

Chang-Kyu Jin ,  Do-Kyung Hwang ,  Tae-Hwan Kim 외 1명

한국진공학회 학술발표회초록집

2014 .08

Low temperature synthesis of carbon nanotubes using Plasma Enhanced Chemical Vapor Deposition(PECVD)

윤형주 ,  강호석 ,  홍진표 외 1명

한국진공학회 학술발표회초록집

2001 .02

Low - k plasma polymerized methyl - cyclohexane thin films deposited by inductively coupled plasma chemical vapor deposition

조현욱 ,  권영춘 ,  양재영 외 1명

한국진공학회 학술발표회초록집

2000 .02

VHF-PECVD for a-Si:H and a-SiN:H Film Deposition

Jin Seok Kim

Applied Science and Convergence Technology

2019 .09

Correlation between Charged Silicon Nanoparticles in the Gas Phase and the Low Temperature Deposition of Crystalline Silicon Films during Hot Wire Chemical Vapor Deposition

유승완 ,  홍주섭 ,  김정형 외 2명

한국진공학회 학술발표회초록집

2014 .02

Optical emission spectroscopic study of reactive species during remote plasma - enhanced chemical vapor deposition of GaN

손철수 ,  윤의준

한국진공학회 학술발표회초록집

1997 .07