Interpretation of current decrease during E - H mode transition in a cylindrical inductively coupled plasma

Jun-Hyeon Moon ,  Ho-Jun Moon ,  Chin-Wook Chung

한국진공학회 학술발표회초록집

2018 .08

Effects of the Capacitive Field in an Inductively Coupled Plasma Discharge

HeeHwan Choe

Applied Science and Convergence Technology

2017 .09

Dry etching of Al₂O₃ thin films in inductively coupled plasma system

Seok SON ,  Young Hee JOO ,  Chang Il KIM

한국진공학회 학술발표회초록집

2016 .08

Effect of bounce resonance heating on Electron Energy Distribution Function in a small Inductively Coupled Plasma

정진욱 ,  서상훈 ,  장홍영

한국진공학회 학술발표회초록집

1999 .07

Inductively Coupled Plasma의 Numerical Simulation

주정훈

한국진공학회 학술발표회초록집

1998 .07

Analysis of chemical reactions of CF₄ and C₄F₈ for inductively coupled plasma based on plasma parameters

J. J. Lee ,  S. J. Kim ,  Y. S. Lee 외 2명

한국진공학회 학술발표회초록집

2019 .08

Study on the electrical and optical diagnosis of electron temperatures according to conditions of plasma emission light intensity in inductively coupled plasma

Ye-Seul LEE ,  Jin-Woo CHOI ,  Tae-Hoon JO 외 3명

한국진공학회 학술발표회초록집

2016 .08

Two - dimensional simulation of inductively coupled large - area plasma source

S. E. Pa ,  k ,  J. K. Lee 외 2명

한국진공학회 학술발표회초록집

2002 .02

A Brief Review of Electron Kinetics in Radio-Frequency Plasmas

Hyo-Chang Lee

Applied Science and Convergence Technology

2019 .07

유도 결합 플라즈마에서 E - H 모드 전이 중 안테나 전류 감소와 히스테리시스 발생

문준현 ,  김경현 ,  이무영 외 1명

한국진공학회 학술발표회초록집

2020 .02

Experimental investigation on plasma density distribution at a wafer-level in an inductively coupled plasma using multiple passive resonant antennas

홍영훈 ,  김주호 ,  이무현 외 2명

한국진공학회 학술발표회초록집

2020 .08

Inductively Coupled Plasma 방전의 Global Modelling 과 Simulation

유광일 ,  윤남석 ,  황순모

한국진공학회 학술발표회초록집

1997 .07

Research on parallelization mechanism of inductively coupled plasma for large area plasma source

이장재 ,  김시준 ,  김광기 외 5명

한국진공학회 학술발표회초록집

2016 .02

Electrical Characteristics of Inductively Coupled Plasma Sources using Magnetic Resonance Wireless Power Transmission System

Ju-Ho Kim ,  Chin-Wook Chung

한국진공학회 학술발표회초록집

2020 .08

Effect of RF Bias on Plasma Parameters and Electron Energy Distribution in RF Biased Inductively Coupled Plasma

Hyo-Chang Lee ,  Chin-Wook Chung

한국진공학회 학술발표회초록집

2012 .02

Power dissipation mode transition by a magnetic field

유신재 ,  정진욱 ,  배근희 외 1명

한국진공학회 학술발표회초록집

2002 .06

Simulation and Measurement of Characteristic in 450 ㎜ CCP Plasma Source

박기정 ,  서상훈 ,  장홍영

한국진공학회 학술발표회초록집

2012 .02

Investigation of Gas Injection Effect in Inductively Coupled Plasma with Fluorocarbon Plasma

Jinha Hwang ,  Minshik Kim ,  Keunju Pa 외 2명

한국진공학회 학술발표회초록집

2009 .02

Temporal fluctuation of electron density measured by means of Wave-Cutoff method in Radio Frequency Capacitive Coupled Plasma

Byung-Keun Na ,  Ki-Min Roh ,  Hong-Young Chang 외 1명

한국진공학회 학술발표회초록집

2007 .08