지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한기계학회 Journal of Mechanical Science and Technology Journal of Mechanical Science and Technology Vol.20 No.4
- 발행연도
- 2006.4
- 수록면
- 554 - 560 (7page)
이용수
초록· 키워드
오류제보하기
This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle) -scale aerodynamic control. Approaches of this work include : (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow ; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies.
목차
Abstract
1. Introduction
2. Micromachined Capacitive Pressure Sensor
3. Micromachined Microjet Modulator
4. Conclusions
Acknowledgments
References
참고문헌 (12)
참고문헌 신청
Baltes, H., 1997, "CMOS Micro Electro Mechanical Systems," Sensors and Materials, Vol.9, No.6, pp.331~346.
Coe, D. J., Allen, M. G., Trautman, M. A. and Glezer, A., 1994, "Micromachined Jets for Manipulation of Macro Flows," in Proceedings 1994 Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp.243~247.
Glezer, A. and Amitay, M., 2002, "Synthetic Jets," Annu. Rev. Fluid Mech., Vol.34, pp.503~529.
Howe, R. T., 1994, "Applications of Silicon Micromachining to Resonator Fabrication," in Proceedings of the 1994 IEEE International Frequency Control Symposium (The 48th Ann ual Symposium) (Cat. No.94CH3446-2), pp.2~7.
James, R. D., Jacob, J. W. and Glezer, A., 1996, "A Round Turbulent Jet Produced by an Oscillating Diaphragm," Journal of Physics of Fluids, Vol.8, No.9, pp.2482~2495.
Coe, D. J., Allen, M. G., Trautman, M. A. and Glezer, A., 1994, "Micromachined Jets for Manipulation of Macro Flows," in Proceedings 1994 Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp.243~247.
Glezer, A. and Amitay, M., 2002, "Synthetic Jets," Annu. Rev. Fluid Mech., Vol.34, pp.503~529.
Howe, R. T., 1994, "Applications of Silicon Micromachining to Resonator Fabrication," in Proceedings of the 1994 IEEE International Frequency Control Symposium (The 48th Ann ual Symposium) (Cat. No.94CH3446-2), pp.2~7.
James, R. D., Jacob, J. W. and Glezer, A., 1996, "A Round Turbulent Jet Produced by an Oscillating Diaphragm," Journal of Physics of Fluids, Vol.8, No.9, pp.2482~2495.
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