Silicon Micromachining

M. Esashi

International Conference on Electronics, Informations and Communications

1998 .01

A New Micromachining Technology Using ( 111 ) Silicon

Sang Woo Lee ,  Sang Jun Pa ,  k 외 1명

International Conference on Electronics, Informations and Communications

1998 .01

Silicon Micromachined RF Components : Review

Jong-Gwan Yook

대한전자공학회 학술대회

1999 .06

Performance Characteristics of a Silicon Micromachined Thermal Flow Sensor for Species of Gases

Sung-Cheoul Roh ,  Yong-Moon Choi

ICEIC : International Conference on Electronics, Informations and Communications

2006 .06

Micromachined Inductors on Silicon Substrates

Hwan Hee. Lee ,  Jae Y. Pa ,  k

대한전자공학회 ISOCC

2005 .10

Silicon Micro-probe Card Using Porous Silicon Micromachining Technology

Young-Min Kim ,  Ho-Cheol Yoon ,  Jong-Hyun Lee

[ETRI] ETRI Journal

2005 .08

Fabrication of a Nanometer-Scale Si Wire by Micromachining of a Silicon-on-Insulator Substrate

H. Fujii ,  S. Kanema ,  u 외 4명

International Conference on Electronics, Informations and Communications

1998 .01

미세공정을 이용한 p+ 실리콘 전극 제작 및 플라즈마 실험

공현구 ,  양상식

대한전기학회 학술대회 논문집

2018 .10

Silicon Micromachining Technologies at Nagoya University

Kazuo Sato

대한기계학회 춘추학술대회 강연집

1999 .01

Demonstration of Robust Micromachined Jet Technology and Its Application to Realistic Flow Control Problems

Sung Pil Chang

Journal of Mechanical Science and Technology

2006 .04

Silicon-Micromachined Vortex Triode

조장호 ,  김종팔 ,  최병규 외 3명

대한전자공학회 학술대회

1998 .01

Miniaturized Silicon Micromachined Bandpass Filter )

육종관

한국전자파학회논문지

1999 .09

Silicon Micromachined Vacuum Encapsulated Resonant Pressure Sensors

Kyoichi Ikeda

International Conference on Electronics, Informations and Communications

1998 .01

A Micromachined Silicon Mirror for Applications to Tunable Optical Switching Device

Kyoung Sung Seo ,  Young Ho Cho ,  Sung Kie Youn

대한기계학회 기타 간행물

1996 .11

Extended Sacrificial Bulk Micromachining Process and Its Application to the Fabrication of X-axis Single-crystalline Silicon Micro-gyroscope

Jongpal Kim ,  Sangjun Pa ,  k 외 7명

제어로봇시스템학회 국제학술대회 논문집

2003 .10

Micromachining and Cleaning of Silicon by Pulsed Laser Ablation and Plasma Generation

Dongsik Kim ,  Bukuk Oh ,  Deoksuk Jang 외 1명

대한기계학회 춘추학술대회

2009 .05

미세가공용 다결정 실리콘 구조체의 제작 및 특성 평가

김형동 ,  백승호 ,  이성준 외 1명

대한전기학회 학술대회 논문집

1995 .07

마이크로채널 내의 온도 분포 측정을 위한 미소 측정 구조물의 제작

박호준 ,  임근배 ,  손상영 외 2명

대한전기학회 학술대회 논문집

2001 .07

A Piezoresistive Silicon Accelerometer Using Porous Silicon Micromachining and Filp Chip Bonding

Jun Hwan Sim ,  Jong Hyun Lee

International Conference on Electronics, Informations and Communications

1998 .01

Real-time detection of focal position for high precision laser micromachining

Binh Xuan Cao ,  Phuong Hoang ,  Sanghoon Ahn 외 2명

한국생산제조학회 학술발표대회 논문집

2016 .10